Reliable measurements for moisture and water vapor

Servomex is the expert in moisture analysis for your process, with an extensive range of moisture analyzer products to measure H2O in a wide range of applications. Our diverse moisture measurement solutions include industry-leading low-level trace measurement solutions for the most demanding semiconductor and ultra-high-purity gas applications, as well as moisture analyzers for general industrial gas purity monitoring, and challenging industrial process conditions.

Doug Barth
Douglas Barth
Senior Global Product Manager

Why measure moisture?

As a contaminant, moisture can significantly affect product quality and process efficiency. It may reduce productivity, damage equipment, and cause unplanned downtime. The accurate measurement of H2O levels in process gases depends on using the right sensing technology to suit each application. As the expert moisture analyzer manufacturer, Servomex offers a wide range of sensing technologies, powering industrial moisture analyzers in a variety of processes including semiconductor manufacturing, medical gases, and air separation units.

The importance of measuring moisture in semiconductor fabs

Ultra-trace qualification of UHP electronic gases is essential for semiconductor fabrication. Even the smallest impurities can cause major defects in a wafer, leading to costly scrap and waste. A moisture analyzer is required that can deliver high-stability measurements with sensitive and consistent performance. An accurate, ultra-trace-level lower detection limit is a must, as is the need to easily store and recall data/calibration records.

Our solutions

Servomex offers a range of sensing technologies for moisture analysis, ranging from ppm-level analysis to the lowest ultra-trace measurements available.

  • Aluminum Oxide sensors work by measuring the capacitance between the aluminum core and a gold film deposited on the oxide layer. The capacitance varies according to the water vapor content in the pores of the oxide layer.
  • Gas Filter Correlation sensing is an advanced Infrared-based measurement technology based on the unique light-absorbing properties of some gases. It performs effectively where extremely accurate, low-level measurements are needed, or where background gases may interfere with the measurement.
  • Infrared sensing is a flexible measurement technology based on the unique light-absorbing properties of some gases, delivering a non-contact, real-time detection of the selected gas’s concentration in a mixture.
  • TDLAS moisture sensing is a specially configured version of our Tunable Diode Laser sensor which is highly specific to moisture, and offers a fast, highly stable, continuous measurement.

Our solutions for moisture analysis

Servomex leads the way in trace and ultra-trace moisture measurements, with our industry-leading SERVOPRO DF-700 series delivering exceptional lower detection limits that meet the most exacting demands of 300mm semiconductor fabs. The AquaXact 1688 moisture sensor provides dew point and ppm moisture analysis for a wide range of industrial gas applications, connecting to a SERVOPRO MultiExact DF310E, MultiExact 4100, or its own dedicated Controller. For hazardous area industrial moisture analysis, the SERVOTOUGH SpectraExact 2500 uses photometric analysis to measure moisture in challenging process environments.

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AquaXact 1688

SERVOPRO Safe Area

A rugged ultra-thin film Aluminum Oxide moisture sensor which measures moisture in a wide variety of gas phase process applications.

SERVOPRO AquaXact 1688
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AquaXact Controller

SERVOPRO Safe Area

Built specifically to work in harmony with the AquaXact 1688 ultra-thin film Aluminum Oxide moisture transmitter.

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DF-740

SERVOPRO Safe Area

A trace moisture analyzer using Tunable Diode Laser (TDL) sensing technology, the DF-740 is designed to measure contaminants in UHP-grade ammonia.

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DF-745

SERVOPRO Safe Area

The DF-745 delivers trace and ultra-trace measurements of moisture for ultra-high-purity (UHP) electronic gas checks in LED/LCD manufacturing processes.

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DF-745 SGMax

SERVOPRO Safe Area

The DF-745 SGMax is designed for the measurement of diverse gas mixtures in specialty gas blending applications.

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DF-749

SERVOPRO Safe Area

Providing trace and ultra-trace moisture contaminant measurements in a variety of background gases, the DF-749 is ideal for quality checking of UHP gases used in LCD and LED manufacture.

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DF-750

SERVOPRO Safe Area

The DF-750 is a trace/ultra-trace moisture analyzer optimized for measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

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DF-750 ULTRA

SERVOPRO Safe Area

Delivering industry-leading trace/ultra-trace moisture measurements, the DF-750 ULTRA is optimized for quality monitoring in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

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DF-760E

SERVOPRO Safe Area

Designed for quality control applications in UHP bulk gases, the compact DF-760E analyzer is a unique solution for the dual measurement of trace and ultra-trace moisture

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DF-760E ULTRA

SERVOPRO Safe Area

Designed for industry-leading quality control measurements in UHP bulk gases, the compact DF-760E ULTRA is a unique dual-analysis solution for trace and ultra-trace moisture and oxygen.

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MonoExact DF310E

SERVOPRO Safe Area

Designed specifically for accurate measurements of oxygen in industrial gas (IG) applications.

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MultiExact 4100

SERVOPRO Safe Area

A high-performance multi-gas analyzer designed to provide up to four simultaneous gas stream measurements.

SERVOPRO MultiExact 4100
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PureGas

SERVOPRO Safe Area

A getter-based purification unit designed for the purification of carrier gases used in Gas Chromatography (GC) and other analytical applications

SERVOPRO PureGas
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SpectraExact 2500

SERVOTOUGH Hazardous Area

Flexible single and multicomponent gas analysis capability for corrosive, toxic and flammable sample streams.

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The Servomex technologies powering moisture analysis

Our moisture analysis analyzer range uses proven sensing solutions that deliver accuracy, ease of use, and a long operational life.

 

The key solution for moisture and dew point measurements

Aluminum Oxide is a sensing technology that provides dew point and parts-per-million measurements of moisture, with results that are free of drift and insensitive to temperature changes. Used in a range of industrial and UHP gas applications, it is at the heart of our AquaXact 1688 moisture transmitter.

Learn more about Aluminum Oxide technology

Gas Filter Correlation sensors deliver stable, ultra-accurate gas analysis

An advanced form of Infrared sensing, Gas Filter Correlation (GFC) technology is ideal in applications with interferent background gases, delivering precise, sensitive measurements. It is used in our SERVOTOUGH SpectraExact 2500 photometric analyzer, and is a key technology for our SERVOPRO multi-gas analyzers, the MultiExact 4100, MultiExact 4200, and 4900 Multigas.

Learn more about GFC technology
Infrared

Real-time Infrared measurements of gases in a mixture

Infrared sensing is a flexible measurement technology based on the unique light-absorbing properties of some gases. It delivers a non-contact, real-time detection of the selected gas’s concentration in a mixture, and is widely used in our analyzer range, including portable analyzers, photometric products, and multi-gas analyzers.

Learn more about Infrared technology
Tunable Diode Laser

TDLAS moisture analysis delivers a simple, sensitive measurement

An essential technology in our SERVOPRO DF-700 series of trace and ultra-trace moisture analyzers, our laser-based moisture sensing relies on specially configured Tunable Diode Laser Analysis Spectroscopy (TDLAS) to deliver reliable, stable results at very low, industry-leading levels.

Learn more about TDLAS technology

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Find out how we can support your moisture process with these resources.

SERVOPRO MonoExact DF310E expert paper

SERVOPRO MonoExact DF310E expert paper

AquaXact 1688 moisture analysis expert paper

AquaXact 1688 moisture analysis expert paper

DF-745 SGMax expert paper

DF-745 SGMax expert paper

Toluene Diisocynate (TDI)

Toluene Diisocynate (TDI)

Moisture measurement solutions for a range of applications

Discover how we provide the moisture analysis required for these key processes

Air separation units

Diverse sensing solutions that adapt to your process

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Medical gases

An advanced solution for purity assay and impurity detection

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UHP Gases / Semiconductors

A comprehensive systems solution

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Vinyl chloride monomer

A solution for safety and protection against corrosion

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Servomex – gas analysis to empower a changing world

Servomex is the global leader in gas analysis, providing solutions for cleaner, more efficient industries, and enabling the manufacture of products that benefit everyone. With 70 years of expertise and research behind us, we deliver industry-changing gas analysis measurements for process control, quality, safety, emissions monitoring, and combustion efficiency.

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Global service support delivered locally

Wherever you are in the world, our network of service engineers provides the expertise you need to keep your ammonia analyzer operating at peak performance. With state-of-the-art service centers around the globe, you’ll always have the support your process needs.

Service team meeting customer

We provide tailored service packages that support your product throughout its life

Our global service network delivers the support you need to keep your analyzer or system operating at peak performance, for total peace of mind.

Broadly, we categorise our customers into two distinct groups

Purity & Speciality

Our Purity & Specialty (P&S) team provides products, knowledge and service to market sectors including industrial and medical gases, UHP gases, and semiconductor manufacture

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Industrial process & Emissions

Our Industrial Process & Emissions (IP&E) division is responsible for our gas analysis solutions in the power generation, hydrocarbon processing and emissions monitoring markets

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Choose the experts in moisture gas analysis

The Servomex difference is clear from the start, all the way through to delivery of a moisture gas analysis system that will transform your process.

We consult with you to determine what you need

Our team stays in place throughout the project, ensuring consistent communication. This starts with identifying the parameters that the system must meet to ensure optimum performance and ease of use.

We design and build your system in our dedicated facility

Our schematics and documents are reviewed by the customer until the final design is agreed upon. Our skilled engineers then assemble the system at one of our cutting-edge regional centers, with continuous evaluation throughout the build process.

We test and deliver your integrated solution

After internal testing and an intensive Factory Acceptance Test (FAT), the finished system is shipped for installation. Our expert support team can commission and calibrate the system and provide any necessary operator training.


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