Reliable measurements for moisture and water vapor

Matt Chambers
Product Manager

Servomex is the expert in moisture analysis for your process, with an extensive range of moisture analyzer products to measure H2O in a wide range of applications. Our diverse moisture measurement solutions include industry-leading low-level trace measurement solutions for the most demanding semiconductor and ultra-high-purity gas applications, as well as moisture analyzers for general industrial gas purity monitoring, and challenging industrial process conditions.

Why measure moisture?

As a contaminant, moisture can significantly affect product quality and process efficiency. It may reduce productivity, damage equipment, and cause unplanned downtime. The accurate measurement of H2O levels in process gases depends on using the right sensing technology to suit each application. As the expert moisture analyzer manufacturer, Servomex offers a wide range of sensing technologies, powering industrial moisture analyzers in a variety of processes including semiconductor manufacturing, medical gases, and air separation units.

The importance of measuring moisture in semiconductor fabs

Ultra-trace qualification of UHP electronic gases is essential for semiconductor fabrication. Even the smallest impurities can cause major defects in a wafer, leading to costly scrap and waste. A moisture analyzer is required that can deliver high-stability measurements with sensitive and consistent performance. An accurate, ultra-trace-level lower detection limit is a must, as is the need to easily store and recall data/calibration records.

Our solutions

Servomex offers a range of sensing technologies for moisture analysis, ranging from ppm-level analysis to the lowest ultra-trace measurements available.

  • Aluminum Oxide sensors work by measuring the capacitance between the aluminum core and a gold film deposited on the oxide layer. The capacitance varies according to the water vapor content in the pores of the oxide layer.
  • Gas Filter Correlation sensing is an advanced Infrared-based measurement technology based on the unique light-absorbing properties of some gases. It performs effectively where extremely accurate, low-level measurements are needed, or where background gases may interfere with the measurement.
  • Infrared sensing is a flexible measurement technology based on the unique light-absorbing properties of some gases, delivering a non-contact, real-time detection of the selected gas’s concentration in a mixture.
  • TDLAS moisture sensing is a specially configured version of our Tunable Diode Laser sensor which is highly specific to moisture, and offers a fast, highly stable, continuous measurement.

Our solutions for moisture analysis

Servomex leads the way in trace and ultra-trace moisture measurements, with our industry-leading SERVOPRO DF-700 series delivering exceptional lower detection limits that meet the most exacting demands of 300mm semiconductor fabs. The AquaXact 1688 moisture sensor provides dew point and ppm moisture analysis for a wide range of industrial gas applications, connecting to a SERVOPRO MultiExact DF310E, MultiExact 4100, or its own dedicated Controller. For hazardous area industrial moisture analysis, the SERVOTOUGH SpectraExact 2500 uses photometric analysis to measure moisture in challenging process environments.

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AquaXact 1688


A rugged ultra-thin film Aluminum Oxide moisture sensor which measures moisture in a wide variety of gas phase process applications.

SERVOPRO AquaXact 1688
  • Fast and accurate moisture measurements
  • Rugged ultra-thin film Aluminium Oxide sensor
  • Functions as a standalone 4-20mA transmitter
  • Remotely interfaces with compatible controller or analyser
  • Sensor element is NIST-traceable and field-replaceable
  • IP65-rated connector

AquaXact Controller


Built specifically to work in harmony with the AquaXact 1688 ultra-thin film Aluminum Oxide moisture transmitter.

  • Specifically designed to operate AquaXact 1688
  • High-clarity colour touchscreen display
  • Alarms, relays, and advanced communications
  • Allows easy sensor tip replacement in the field
  • Powerful, intuitive software control
  • Compact and easy to integrate into your system



The DF-745 delivers trace and ultra-trace measurements of moisture for ultra-high-purity (UHP) electronic gas checks in LED/LCD manufacturing processes.

  • Delivers trace/ultra-trace moisture measurements
  • For electronic gas checks in LED/LCD manufacturing
  • Can monitor multiple background gases
  • Lower Detection Limit of 1 part per billion
  • Designed for exceptional operational flexibility
  • Ultra-reliable baseline measurements

DF-745 SGMax


The DF-745 SGMax is designed for the measurement of diverse gas mixtures in specialty gas blending applications.

  • Optimized for speciality gas blending
  • Accurate TDL analysis of trace moisture
  • An adaptable solution for diverse applications
  • Lower Detection Limit of 5 parts per billion
  • Database of 17 standard background gases
  • Virtually eliminates dry down times



Providing trace and ultra-trace moisture contaminant measurements in a variety of background gases, the DF-749 is ideal for quality checking of UHP gases used in LCD and LED manufacture.

  • Trace/ultra-trace moisture measurements
  • Checks purity in UHP electronic gases
  • Easily portable for cart or mobile use
  • Lower Detection Limit of 250 parts per trillion
  • Factory-calibrated for quick and easy installation
  • Minimised ongoing maintenance needs



The DF-750 is a trace/ultra-trace moisture analyzer optimized for measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

  • A trace/ultra-trace moisture analyser
  • For purity checks in electronics-grade gases
  • Stable, highly accurate TDL measurements
  • 100ppt Lower Detection Limit
  • Low lifetime maintenance requirements



Delivering industry-leading trace/ultra-trace moisture measurements, the DF-750 ULTRA is optimized for quality monitoring in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

  • Delivers industry-best moisture measurements
  • Industry-leading 55 ppt Lower Detection Limit
  • Zero-drift stability extends calibration intervals
  • Measures in N2, H2, He, Ar and O2
  • Designed to meet exceptional gas purity standards



Designed for quality control applications in UHP bulk gases, the compact DF-760E analyzer is a unique solution for the dual measurement of trace and ultra-trace moisture

  • For quality control in UHP bulk gases
  • Dual moisture and oxygen analysis
  • Trace and ultra-trace measurements
  • Non-depleting Coulometric O2 sensor
  • Robust TDL moisture sensing
  • Exceptional Lower Detection Limits



Designed for industry-leading quality control measurements in UHP bulk gases, the compact DF-760E ULTRA is a unique dual-analysis solution for trace and ultra-trace moisture and oxygen.

  • Dual moisture/oxygen analyser for UHP gases
  • Ideal for quality checking and leak detection
  • Lower Detection Limit of 55ppt moisture
  • Oxygen Lower Detection Limit of 45ppt
  • Combines Coulometric and TDL sensing
  • Broad detection ranges

MonoExact DF310E


Designed specifically for accurate measurements of oxygen in industrial gas (IG) applications.

  • Accurate measurements of oxygen and moisture
  • Designed for industrial gas applications
  • Tried and tested digital Coulometric oxygen sensor
  • Non-depleting Paramagnetic sensor option
  • Plug-and-play moisture sensor support
  • Analogue and digital communication options
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MultiExact 4100


A high-performance multi-gas analyzer designed to provide up to four simultaneous gas stream measurements.

SERVOPRO MultiExact 4100
  • Highly adaptable multi-gas analyzer
  • Provides up to four simultaneous measurements
  • Wide range of sensing technology options
  • Versatile solution for industrial and medical gases
  • Built-in support for moisture sensor
  • Optional advanced digital protocols



A getter-based purification unit designed for the purification of carrier gases used in Gas Chromatography (GC) and other analytical applications

  • Getter-based purification unit
  • Designed for carrier gases used in Gas Chromatography
  • Reduces outlet impurity levels to ppb or below
  • Removes impurities by forming irreversible chemical bonds
  • Efficient ceramic fibre insulation
  • Built to operate continuously, without servicing

SpectraExact 2500

SERVOTOUGH Hazardous Area

Flexible single and multicomponent gas analysis capability for corrosive, toxic and flammable sample streams.

  • Rugged, reliable photometric analysis
  • Designed for continually flammable samples
  • Suitable for hazardous area applications
  • Ideal for diverse gas sample types
  • Uses field-proven non-depleting technologies
  • Certified for gases

The Servomex technologies powering moisture analysis

Our moisture analysis analyzer range uses proven sensing solutions that deliver accuracy, ease of use, and a long operational life.


The key solution for moisture and dew point measurements

Aluminum Oxide is a sensing technology that provides dew point and parts-per-million measurements of moisture, with results that are free of drift and insensitive to temperature changes. Used in a range of industrial and UHP gas applications, it is at the heart of our AquaXact 1688 moisture transmitter.

Learn more about Aluminum Oxide technology

Gas Filter Correlation sensors deliver stable, ultra-accurate gas analysis

An advanced form of Infrared sensing, Gas Filter Correlation (GFC) technology is ideal in applications with interferent background gases, delivering precise, sensitive measurements. It is used in our SERVOTOUGH SpectraExact 2500 photometric analyzer, and is a key technology for our SERVOPRO multi-gas analyzers, the MultiExact 4100, MultiExact 4200, and 4900 Multigas.

Learn more about GFC technology

Real-time Infrared measurements of gases in a mixture

Infrared sensing is a flexible measurement technology based on the unique light-absorbing properties of some gases. It delivers a non-contact, real-time detection of the selected gas’s concentration in a mixture, and is widely used in our analyzer range, including portable analyzers, photometric products, and multi-gas analyzers.

Learn more about Infrared technology
Tunable Diode Laser

TDLAS moisture analysis delivers a simple, sensitive measurement

An essential technology in our SERVOPRO DF-700 series of trace and ultra-trace moisture analyzers, our laser-based moisture sensing relies on specially configured Tunable Diode Laser Analysis Spectroscopy (TDLAS) to deliver reliable, stable results at very low, industry-leading levels.

Learn more about TDLAS technology

Download more information

Find out how we can support your moisture process with these resources.

SERVOPRO MonoExact DF310E expert paper

SERVOPRO MonoExact DF310E expert paper

AquaXact 1688 moisture analysis expert paper

AquaXact 1688 moisture analysis expert paper

DF-745 SGMax expert paper

DF-745 SGMax expert paper

Toluene Diisocynate (TDI)

Toluene Diisocynate (TDI)

Moisture measurement solutions for a range of applications

Discover how we provide the moisture analysis required for these key processes

Air separation units

Diverse sensing solutions that adapt to your process

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Medical gases

An advanced solution for purity assay and impurity detection

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UHP Gases / Semiconductors

A comprehensive systems solution

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Vinyl chloride monomer

A solution for safety and protection against corrosion

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Servomex – gas analysis to empower a changing world

Servomex is the global leader in gas analysis, providing solutions for cleaner, more efficient industries, and enabling the manufacture of products that benefit everyone. With 70 years of expertise and research behind us, we deliver industry-changing gas analysis measurements for process control, quality, safety, emissions monitoring, and combustion efficiency.

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Global service support delivered locally

Wherever you are in the world, our network of service engineers provides the expertise you need to keep your ammonia analyzer operating at peak performance. With state-of-the-art service centers around the globe, you’ll always have the support your process needs.

Service team meeting customer

We provide tailored service packages that support your product throughout its life

Our global service network delivers the support you need to keep your analyzer or system operating at peak performance, for total peace of mind.

Broadly, we categorise our customers into two distinct groups

Purity & Speciality

Our Purity & Specialty (P&S) team provides products, knowledge and service to market sectors including industrial and medical gases, UHP gases, and semiconductor manufacture

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Industrial process & Emissions

Our Industrial Process & Emissions (IP&E) division is responsible for our gas analysis solutions in the power generation, hydrocarbon processing and emissions monitoring markets

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Choose the experts in moisture gas analysis

The Servomex difference is clear from the start, all the way through to delivery of a moisture gas analysis system that will transform your process.

We consult with you to determine what you need

Our team stays in place throughout the project, ensuring consistent communication. This starts with identifying the parameters that the system must meet to ensure optimum performance and ease of use.

We design and build your system in our dedicated facility

Our schematics and documents are reviewed by the customer until the final design is agreed upon. Our skilled engineers then assemble the system at one of our cutting-edge regional centers, with continuous evaluation throughout the build process.

We test and deliver your integrated solution

After internal testing and an intensive Factory Acceptance Test (FAT), the finished system is shipped for installation. Our expert support team can commission and calibrate the system and provide any necessary operator training.

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