SERVOPRO DF high purity

The DF-750 ULTRA is the first choice in moisture analysis for the semiconductor industry

The DF-750 ULTRA is a trace/ultra-trace analyzer optimized to deliver industry-best moisture measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

Moisture measurements for quality control in semiconductor fabs

Designed specifically to make trace and ultra-trace moisture measurements in a range of UHP gases, the DF-750 ULTRA is optimized for 300mm semiconductor fabs. It measures moisture as a contaminant in the electronics grade gases nitrogen, hydrogen, helium, argon and oxygen.

Tunable Diode Laser (TDL) sensing technology delivers an industry-leading 55 parts-per-trillion (ppt) Lower Detection Limit (LDL), ensuring the DF-750 ULTRA’s stable, highly accurate measurements meet the precise monitoring needs of semiconductor production.

The robust DF-750 ULTRA has low lifetime maintenance requirements and delivers zero-drift stability, greatly extending calibration intervals. This low cost- of-ownership combined with exceptional measurement performance means that the DF-750 ULTRA is the first-choice analytical solution for UHP gas quality checks.

Mike Proctor
Mike Proctor
Business Unit Director, P&S

High stability TDL trace/ultra-trace measurements

Ultra-trace qualification of UHP electronic gases is essential for semiconductor fabrication. You need a moisture analyzer
that can deliver high stability measurements with sensitive and consistent performance. An accurate and low LDL is a must, as is the need to easily store and recall data/calibration records. No matter what your requirements, you’ll want a moisture analyzer that can provide operational efficiencies. We don’t believe you should have to compromise.

A no-compromise solution

The DF-750 ULTRA is designed to meet the exceptional gas purity standards demanded by semiconductor manufacturers worldwide. Utilizing leading-edge TDL sensing technology, housed in a robust and resilient Herriot Cell, the DF-750 ULTRA avoids moisture contact with optical sensing components. The result is an analyzer that delivers an ultra-sensitive, industry-leading 55ppt Lower Detection Limit, ideal for checking for minute levels of moisture in a wide range of UHP electronics grade gases, including N2, H2, He, Ar and O2. With data recorded and readily available through flexible storage and recall functions, the DF-750 ULTRA is the complete solution for UHP gas monitoring in 300mm semiconductor fabs.

Simple maintenance and reduced ongoing costs

The use of patented leading-edge TDL technology provides zero drift accuracy, reducing ongoing calibration requirements, while the use of this sensing principle also helps to reduce ongoing maintenance thanks to its non-depleting nature.

Man with Servomex System components

Let’s build a great system together

If you’re looking for a gas analysis system, our expert team provides the design, build and installation capabilities you’re looking for. With a collaborative approach and project management from start to finish, we’ll ensure you get the system that meets your exact process requirements.

Ready to buy? Here’s how it works

It’s easy to find the product you need for your application with Servomex

Servomex UK technical center


Get in touch to tell us what you need and the application you plan to use it for

Servomex Gas System Schematics


Our expert team will help you select the right product package, ensuring you have the accessories and support to get the best performance from your analyzer

Woman Assembling Sensors


Your analyzer will be assembled in one of our state-of-the-art engineering centers and rapidly dispatched to your site

The benefits of TDL moisture measurements

With low maintenance requirements and zero-drift stability, the DF-750 ULTRA provides high-specification measurement performance for a low cost of ownership.

Storage and recall function

Calibration, system error and measurement data facilitates archiving of operational history for the DF-750 ULTRA.

Industry-leading performance

With an exceptionally low 55ppt LDL, the DF-750 ULTRA delivers the sensitivity and precision demanded by the semiconductor production industry.

High reliability

By minimizing water contact with optical components, the DF-750 ULTRA’s repeatable baseline measurements are unaffected by loss in mirror reflectivity, ensuring accuracy and stability.

Unrivalled performance

  • Uses industry-leading, non-depleting, high stability TDL trace sensing with zero drift
  • Analysis resistant to gas cell contamination: DF-750 ULTRA operates to specification with up to 90% signal loss
  • Industry leading 55ppt Lower Detection Limit
  • Manufactured by Servomex – over 70 years’ experience pioneering gas analysis with thousands of units used in the field


  • Broad detection range: 0-20ppm
  • Storage and recall function: calibration, system error and measurement data facilitates archiving operational history
  • Operable via front panel or digital communication options

Easy to use

  • Simplified ongoing maintenance requirements through the use of non-depleting, low drift potential TDL sensing technology
  • High reliability; repeatable baseline measurements are not affected by a loss in mirror reflectivity

Low cost of ownership

  • Robust sensor construction reduces maintenance requirements
  • Zero drift extends calibration intervals

Benchmark compliance

  • IEC 61010-1
  • Overvoltage Category II, Pollution Degree 2
  • EU EMC Directive
  • EU Low Voltage Directive

Gases sensed, measurements and technologies

Using industry-leading, non-depleting, high-stability TDL trace sensing with zero drift, the DF-750 ULTRA measures moisture at trace and ultra-trace levels in electronics grade gases.

Gas Measurement
Water vapour (Moisture) (H₂O)ppm, ppt, ppb


Tunable Diode Laser


  • IEC 61010-1
  • Overvoltage Category II, Pollution Degree 2
  • EU EMC Directive
  • EU Low Voltage Directive

Schematics (select to expand)


483mm (19”) Wide x 266mm(10.5”) High x 608mm (23.9”) Deep


<31.8kg (70lbs)

Get the detailed specifications

“For in-depth specifications you’ll want to download our technical datasheet which includes information on technology, performance, operating environment, sample conditions and compliance along with technical drawings and top-level benefits and applications.”

Mike Proctor
Mike Proctor
Business Unit Director, P&S

Download all materials at once

We have compiled a comprehensive DF-750 ULTRA resource package, which you can download all at once. Download now to learn more about product features, advantages and technical specifications.

Mike Proctor
Mike Proctor
Business Unit Director, P&S

Manuals and brochures

Want to learn more about the DF-750 ULTRA? Download the product brochure for an overview of the analyzer’s advantages and capabilities.

ES Magazine Issue 25 Semicon

ES Magazine Issue 25 Semicon

SERVOPRO DF-750 ULTRA Product brochure

SERVOPRO DF-750 ULTRA Product brochure

GC-PED vs APIMS expert paper

GC-PED vs APIMS expert paper

ES Magazine ULTRA Series

ES Magazine ULTRA Series

See for yourself

Our videos give you the chance to watch our products in action and hear from our experts. You can also see our analyzers unboxed, and find out more about our solutions for key applications

Total UHP Solutions

See our unique single-supplier solution for UHP gases

Typical applications

The DF-750 ULTRA is designed to measure moisture in UHP gases and is the leading choice for semiconductor industry applications.

Bulk gas quality control checks for UHP electronic gases used in 300mm semiconductor fabs | Leak detection checks for UHP electronic gases used in 300mm semiconductor fabs

UHP Gases / Semiconductors

A comprehensive systems solution

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