SERVOPRO product range

Reliable, stable and accurate gas measurements for safe area applications

The SERVOPRO analyzers utilize an extensive portfolio of our non-depleting gas sensing technologies – including Paramagnetic, Zirconia, Flame Ionization Detection, Plasma, and Gas Chromatograph for a diverse range of applications.

These flexible analyzers either meet specific measurement requirements, such as for syngas, hydrocarbons, or trace gas mixtures, or provide multi-gas monitoring capabilities for applications such as continuous emissions monitoring systems or air separation unit plants.

SERVOPRO delivers accurate safe area analysis

Setting the standard for analysis in the industrial gas (IG) and semiconductor markets, the SERVOPRO range leads the field in measurement sensitivity

A wide range of sensing technologies

The flexible SERVOPRO range is designed to suit an extensive variety of measurements in IG and semiconductor applications. To this end, it uses an array of sensing technologies, including non-contact, non-depleting methods, covering a generous selection of gases and measurement ranges, to meet the needs of multiple safe area applications.

Industry-leading detection levels

Whether you’re monitoring impurities in air separation unit gases, or ensuring the highest level of purity in semiconductor gases, the SERVOPRO range is up to the task, delivering the measurement sensitivity and performance required – from percentage-level readings to the lowest levels of trace detection available to the market.

Easy to use and integrate

Designed for simple operation, the SERVOPRO range is available for benchtop use or can be mounted in a 19” rack. All the analyzers feature extensive functionality, can be operated directly via intuitive onboard software, or remotely using a variety of analog and digital communications options, ensuring effective operation now and in the future.

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4900 Multigas

SERVOPRO Safe Area

The 4900 Multigas is a high-performance CEMS analyzer designed for a wide range of multi-gas measurements.

  • Advanced digital multi-gas CEMS analysis
  • Up to four simultaneous gas stream measurements
  • Ultra-stable, accurate, non-depleting sensors
  • Auto-calibration for reduced operational needs
  • Intuitive-use icon-driven colour touchscreen
  • Digital communications for remote access

AquaXact 1688

SERVOPRO Safe Area

A rugged ultra-thin film Aluminum Oxide moisture sensor which measures moisture in a wide variety of gas phase process applications.

SERVOPRO AquaXact 1688
  • Fast and accurate moisture measurements
  • Rugged ultra-thin film Aluminium Oxide sensor
  • Functions as a standalone 4-20mA transmitter
  • Remotely interfaces with compatible controller or analyser
  • Sensor element is NIST-traceable and field-replaceable
  • IP65-rated connector

AquaXact Controller

SERVOPRO Safe Area

Built specifically to work in harmony with the AquaXact 1688 ultra-thin film Aluminum Oxide moisture transmitter.

  • Specifically designed to operate AquaXact 1688
  • High-clarity colour touchscreen display
  • Alarms, relays, and advanced communications
  • Allows easy sensor tip replacement in the field
  • Powerful, intuitive software control
  • Compact and easy to integrate into your system

Chroma

SERVOPRO Safe Area

The Chroma is optimized to specific background gases to ensure optimum performance for your application.

  • Versatile, ultra-accurate trace gas analysis
  • Choice of non-depleting sensor technologies
  • Cost-effective solution for process control or quality monitoring
  • Works in a wide range of background gases
  • Compact 4U rack-compatible design
  • Flexible communication options

DF-550E NanoTrace

SERVOPRO Safe Area

An ultra-trace Coulometric oxygen analyzer, the DF-550E is optimized for quality measurements in ultra-high-purity electronic gases.

DF-550E an ultra-trace Coulometric oxygen analyzer.
  • An ultra-trace Coulometric oxygen analyser
  • For quality measurements in electronic gases
  • 200 parts-per-trillion Lower Detection Limit
  • Suitable for use with multiple background gases
  • Unaffected by sample and flow rate changes
  • Hand-carry portable option

DF-560E NanoTrace ULTRA

SERVOPRO Safe Area

A superior quality control solution for ultra-high-purity (UHP) electronic grade gases, the DF-560E Ultra delivers an industry-best detection of 45 parts per trillion for oxygen (O2).

SERVOPRO DF-560E ULTRA
  • Delivers industry-best oxygen measurements
  • For quality control in ultra-high-purity gases
  • Lower Detection Limit of 45 parts-per-trillion
  • High-stability Coulometric sensing technology
  • Optimised for ease of use and portability
  • Cost-effective setup and configuration

DF-745

SERVOPRO Safe Area

The DF-745 delivers trace and ultra-trace measurements of moisture for ultra-high-purity (UHP) electronic gas checks in LED/LCD manufacturing processes.

  • Delivers trace/ultra-trace moisture measurements
  • For electronic gas checks in LED/LCD manufacturing
  • Can monitor multiple background gases
  • Lower Detection Limit of 1 part per billion
  • Designed for exceptional operational flexibility
  • Ultra-reliable baseline measurements

DF-745 SGMax

SERVOPRO Safe Area

The DF-745 SGMax is designed for the measurement of diverse gas mixtures in specialty gas blending applications.

  • Optimized for speciality gas blending
  • Accurate TDL analysis of trace moisture
  • An adaptable solution for diverse applications
  • Lower Detection Limit of 5 parts per billion
  • Database of 17 standard background gases
  • Virtually eliminates dry down times

DF-749

SERVOPRO Safe Area

Providing trace and ultra-trace moisture contaminant measurements in a variety of background gases, the DF-749 is ideal for quality checking of UHP gases used in LCD and LED manufacture.

  • Trace/ultra-trace moisture measurements
  • Checks purity in UHP electronic gases
  • Easily portable for cart or mobile use
  • Lower Detection Limit of 250 parts per trillion
  • Factory-calibrated for quick and easy installation
  • Minimised ongoing maintenance needs

DF-750

SERVOPRO Safe Area

The DF-750 is a trace/ultra-trace moisture analyzer optimized for measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

  • A trace/ultra-trace moisture analyser
  • For purity checks in electronics-grade gases
  • Stable, highly accurate TDL measurements
  • 100ppt Lower Detection Limit
  • Low lifetime maintenance requirements

DF-750 ULTRA

SERVOPRO Safe Area

Delivering industry-leading trace/ultra-trace moisture measurements, the DF-750 ULTRA is optimized for quality monitoring in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

  • Delivers industry-best moisture measurements
  • Industry-leading 55 ppt Lower Detection Limit
  • Zero-drift stability extends calibration intervals
  • Measures in N2, H2, He, Ar and O2
  • Designed to meet exceptional gas purity standards

DF-760E

SERVOPRO Safe Area

Designed for quality control applications in UHP bulk gases, the compact DF-760E analyzer is a unique solution for the dual measurement of trace and ultra-trace moisture

  • For quality control in UHP bulk gases
  • Dual moisture and oxygen analysis
  • Trace and ultra-trace measurements
  • Non-depleting Coulometric O2 sensor
  • Robust TDL moisture sensing
  • Exceptional Lower Detection Limits

DF-760E ULTRA

SERVOPRO Safe Area

Designed for industry-leading quality control measurements in UHP bulk gases, the compact DF-760E ULTRA is a unique dual-analysis solution for trace and ultra-trace moisture and oxygen.

  • Dual moisture/oxygen analyser for UHP gases
  • Ideal for quality checking and leak detection
  • Lower Detection Limit of 55ppt moisture
  • Oxygen Lower Detection Limit of 45ppt
  • Combines Coulometric and TDL sensing
  • Broad detection ranges

FID

SERVOPRO Safe Area

With trace analysis capability, the FID is ideal for ASU safety and quality control applications.

  • Ideal for ASU safety and quality control
  • Robust Flame Ionization Detector analysis
  • Delivers trace Total Hydrocarbon measurements
  • An adaptable solution for diverse applications
  • Low-noise FID sensing for superior accuracy
  • Range of remote communication options

HFID

SERVOPRO Safe Area

Utilizes an internally heated oven set to 190°C (374°F) to maintain the sample gas above its dew point, for optimum performance in total hydrocarbon analysis (THC).

  • Highly sensitive trace hydrocarbon analyser
  • Ideal for vehicle/engine certification testing
  • Heated FID for volatile hydrocarbon concentrations
  • Delivers real-time, on-stream gas analysis
  • Cutter system removes non-methane hydrocarbons
  • Four user-definable measurement range options

MonoExact DF150E

SERVOPRO Safe Area

The MonoExact DF150E combines the reliability of Servomex’s tried and tested Coulometric oxygen sensor with a more user-friendly package.

  • Digital touchscreen and icon-driven interface
  • Tried and tested digital Coulometric oxygen sensor
  • Optimised for industrial gas applications
  • Measures oxygen across three ranges
  • Compact footprint for simple integration
  • No sensor zero calibration required
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MonoExact DF310E

SERVOPRO Safe Area

Designed specifically for accurate measurements of oxygen in industrial gas (IG) applications.

  • Accurate measurements of oxygen and moisture
  • Designed for industrial gas applications
  • Tried and tested digital Coulometric oxygen sensor
  • Non-depleting Paramagnetic sensor option
  • Plug-and-play moisture sensor support
  • Analogue and digital communication options
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MultiExact 4100

SERVOPRO Safe Area

A high-performance multi-gas analyzer designed to provide up to four simultaneous gas stream measurements.

SERVOPRO MultiExact 4100
  • Highly adaptable multi-gas analyzer
  • Provides up to four simultaneous measurements
  • Wide range of sensing technology options
  • Versatile solution for industrial and medical gases
  • Built-in support for moisture sensor
  • Optional advanced digital protocols

MultiExact 4200

SERVOPRO Safe Area

The MultiExact 4200 analyzes up to four gases simultaneously for Syngas and HyCO

  • For HyCO, Syngas, H2, and gas transfer applications
  • A high-specification multi-gas analyser
  • Measures up to four gas streams simultaneously
  • Combines industry-leading sensing technologies
  • Low cost of ownership and minimal maintenance
  • Intuitive-use icon-driven colour touchscreen

NanoChrome

SERVOPRO Safe Area

Incorporating the latest advances in gas sensing and signal processing methodology, the NanoChrome revolutionizes ultra-trace purity measurements.

  • Ultra-trace purity measurements in UHP gases
  • Designed for semiconductor manufacturing
  • Uses advanced Plasma Emission Detector sensor
  • Sensitive ProPeak software for high accuracy
  • Removes the need for flammable fuel gas
  • Comprehensive reporting and statistical analysis

NanoChrome ULTRA

SERVOPRO Safe Area

Using proven ultra-trace sensing, the NanoChrome ULTRA conquers the most stringent demands of the semiconductor industry, delivering a cost-effective solution compared to competing technologies.

  • The top choice for ultra-trace purity measurements
  • Designed for the semiconductor wafer industry
  • Superior measurements of ultra-high-purity gases
  • Highly specific, non-depleting PED sensing
  • ProPeak filtering for highly sensitive measurements
  • Removes the need for flammable fuel gas

NOx

SERVOPRO Safe Area

Measures NO or NO/NO2/NOx concentrations in industrial gas and vehicle emission applications.

  • Measures NO or NO/NO2/NOx concentrations
  • Uses time-proven Chemiluminescence sensing
  • Monitors industrial stationary sources emissions
  • Fast enough for emissions testing in engines
  • No vacuum pump requirement
  • Four user-definable measurement ranges

Plasma

SERVOPRO Safe Area

The Plasma delivers an accurate, highly stable and reliable measurement, with high sensitivity in the 0-1ppm range.

SERVOPRO Plasma
  • Analyses nitrogen in argon
  • Specifically designed for ASU plants
  • Unsurpassed stability and selectivity
  • High-specification Plasma Emissions Detector
  • Standard or high-purity setting modes
  • Reliable and accurate continuous monitoring

PureGas

SERVOPRO Safe Area

A getter-based purification unit designed for the purification of carrier gases used in Gas Chromatography (GC) and other analytical applications

SERVOPRO PureGas
  • Getter-based purification unit
  • Designed for carrier gases used in Gas Chromatography
  • Reduces outlet impurity levels to ppb or below
  • Removes impurities by forming irreversible chemical bonds
  • Efficient ceramic fibre insulation
  • Built to operate continuously, without servicing

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