Incorporating the latest advances in gas sensing and signal processing methodology, the NanoChrome revolutionizes ultra-trace purity measurements for the semiconductor industry.
A high-performance analyzer specifically designed for the semiconductor manufacturing industry, the NanoChrome offers the highest reliability monitoring of argon (Ar), methane (CH4), carbon monoxide (CO), carbon dioxide (CO2), hydrogen (H2), nitrogen (N2) and non-methane hydrocarbons (NMHC) in a wide range of common background gases including Ar, H2, helium (He), N2 and oxygen (O2).
Updated with a larger display and the latest software, the NanoChrome uses an advanced Plasma Emission Detector (PED) sensor and sensitive ProPeak software, both specially developed by Servomex.
The NanoChrome’s sensing technology provides considerable advantages over traditional Flame Ionization Detector (FID) and Reduction Gas Detection (RGD) sensing technologies in terms of performance, stability, safety and ability to reduce on-going costs.
Servomex’s advanced signal recovery uses patented ProPeak filtering methods to deliver a highly sensitive and selective measurement you can rely on. With no need for a methanizer or requirement flammable fuel gas, the NanoChrome also delivers appreciable cost benefits.
When monitoring UHP gases used in semiconductor wafer manufacture, the highest sensitivity and performance is essential.
A suitable analytical solution must offer the flexibility to monitor
all required gases in common background gases – and do so with complete selectivity and accuracy at ultra-trace levels. No matter your application needs, you’ll want a solution that can reduce ongoing costs and help you leverage business efficiencies. We don’t believe you should have to compromise.
The NanoChrome is a game-changing analyzer that provides the highest level of performance accuracy and selectivity currently available. Using leading-edge, patented PED sensing technology,
this device delivers notable advantages over comparable analysis techniques. Not only is it highly specific to the gases being measured in diverse gas streams, it also removes the need for flammable fuel gas – allowing the NanoChrome to deliver an enhanced-safety solution. When a complete, stand-alone solution is demanded, NanoChrome can be combined with the DF-500 (ultra-trace ppt O2) and DF-700 (ultra-trace moisture) analyzer series.
By combining Servomex’s specially developed non-depleting PED technology with advanced new processing and operational software, NanoChrome allows calibration periods to be extended, helping to reduce on-going costs considerably over product life. The addition
of intelligent signal processing ensures this device offers the highest grade of accuracy, maximizing process uptime. Comprehensive digital communications protocols and access via a network or internet browser facilitate flexible remote device interaction, while an intelligent software package provides the ability to generate comprehensive reporting and statistical analysis. This makes the NanoChrome the analyzer to which all other UHP gas monitoring analyzers will be compared.
If you’re looking to build a UHP gas analysis system, with the seamless integration that comes from using a single supplier, we can help. Contact our expert systems team to learn more.
It’s easy to find the product you need for your application with Servomex
Get in touch to tell us what you need and the application you plan to use it for
Our expert team will help you select the right product package, ensuring you have the accessories and support to get the best performance from your analyzer
Your analyzer will be assembled in one of our state-of-the-art engineering centers and rapidly dispatched to your site
The revolutionary NanoChrome delivers significant benefits to the semiconductor industry, as a standalone device or as part of Servomex’s total solution for UHP gases
The NanoChrome is compliant with Low Voltage, EMC and applicable Directives.
The highly sensitive Plasma Emission Detector eliminates the use of FID or RGD detectors, with their associated safety issues and high costs of ownership.
Each analyzer has unique Pro-Peak software and a robust, Windows 10-based operating system for increased security and stability. A fully automated system and large display screen simplifies operation.
In compliance with Low Voltage, EMC and applicable Directives
The NanoChrome measures the gases below in common background gases at ultra-trace levels, for the highest reliability in purity monitoring.
| Gas | Measurement |
|---|---|
| Argon (Ar) | ppb, ppt |
| Methane (CH₄) | ppb, ppt |
| Carbon monoxide (CO) | ppb, ppt |
| Carbon dioxide (CO₂) | ppb, ppt |
| Hydrogen (H₂) | ppb, ppt |
| Nitrogen (N₂) | ppb, ppt |
| Non-methane hydrocarbons (NMHC) | ppb, ppt |
| Oxygen (O₂) | ppb, ppt |
Technologies
In compliance with EMC Directives, rated for Overvoltage Category II and Pollution Degree 2
482mm (18.9”) Wide x 117mm (4.6”) High x 600mm (23.6”) Deep
11-27kg (25-60lb) applications dependent
“For in-depth specifications you’ll want to download our technical datasheet which includes information on technology, performance, operating environment, sample conditions and compliance along with technical drawings and top-level benefits and applications.”
“Our NanoChrome resource pack contains all the information you need to discover how the analyzer can enhance your process performance, including the product brochure and operator manual.”
Download the manual and brochure for this product to find out how it is installed and operated. You’ll also discover its features and benefits, and get all the technical data you need.
Our videos give you the chance to watch our products in action and hear from our experts. You can also see our analyzers unboxed, and find out more about our solutions for key applications
The SERVOPRO NanoChrome
Find out about our high-performance analyzer for the semiconductor industry
Unboxed: the SERVOPRO NanoChrome
Our experts Chris Davis and Roberto Alzaga unbox this analyzer
The NanoChrome offers accurate, reliable gas analysis for applications and processes across a variety of industries.
Semiconductor Production – Quality Control Measurements | Semiconductor Production – Stationary Analytical Systems
