SERVOPRO product range

Reliable, stable and accurate gas measurements for safe area applications

The SERVOPRO analyzers utilize an extensive portfolio of our non-depleting gas sensing technologies – including Paramagnetic, Zirconia, Flame Ionization Detection, Plasma, and Gas Chromatograph for a diverse range of applications.

These flexible analyzers either meet specific measurement requirements, such as for syngas, hydrocarbons, or trace gas mixtures, or provide multi-gas monitoring capabilities for applications such as continuous emissions monitoring systems or air separation unit plants.

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SERVOPRO delivers accurate safe area analysis

Setting the standard for analysis in the industrial gas (IG) and semiconductor markets, the SERVOPRO range leads the field in measurement sensitivity

A wide range of sensing technologies

The flexible SERVOPRO range is designed to suit an extensive variety of measurements in IG and semiconductor applications. To this end, it uses an array of sensing technologies, including non-contact, non-depleting methods, covering a generous selection of gases and measurement ranges, to meet the needs of multiple safe area applications.

Industry-leading detection levels

Whether you’re monitoring impurities in air separation unit gases, or ensuring the highest level of purity in semiconductor gases, the SERVOPRO range is up to the task, delivering the measurement sensitivity and performance required – from percentage-level readings to the lowest levels of trace detection available to the market.

Easy to use and integrate

Designed for simple operation, the SERVOPRO range is available for benchtop use or can be mounted in a 19” rack. All the analyzers feature extensive functionality, can be operated directly via intuitive onboard software, or remotely using a variety of analog and digital communications options, ensuring effective operation now and in the future.

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Gas Sensed
Hydrogen sulfide (H₂S) Methane (CH₄) Nitric oxide (NO) Nitrogen (N₂) Nitrous oxide (N₂O) Non-methane hydrocarbons (NMHC) Oxygen (O₂) Propane (C₃H₆) Ammonia (NH₃) Sulfur dioxide (SO₂) Argon (Ar) Total Hydrocarbons (THC) Carbon dioxide (CO₂) Water vapour (Moisture) (H₂O) Carbon monoxide (CO) Hydrocarbon mixtures (C₁-C₅) Carbon monoxide + methane (CO + CH₄) Helium (He) Combustibles (COe) Nitrogen dioxide (NO₂) Hydrogen (H₂) Nitrogen oxides (NOx) Hydrogen choride (HCL)
Measurement
Calorific Value Percent Trace (ppm) Ultra Trace (ppt) Ultra Trace (ppb) Dew Point Parts per million by volume (ppmv)
Technology
Infrared Laser Moisture Paramagnetic Plasma Thermal Conductivity Tunable Diode Laser Zirconia Spectroscopic Aluminum Oxide Calorimetry Chemiluminescence Coulometric Flame Ionization Detector Gas Chromatography Gas Filter Correlation
Key applications
Ammonia slip and emissions Carbon capture and storage Bottling & transfilling Propylene oxide Air separation units Vinyl chloride monomer Coal-fired thermal power Ethylene Dichloride UHP Gases / Semiconductors Marine vapor control Medical gases Purified Terephthalic Acid Process heaters and furnaces Direct reduction iron production Ethylene production Ethylene Oxide
Product range
SERVOPRO Safe Area
Additional terms
SO2 Boiler Bottling and transfilling ULTRA THC Heater O2 H2O Furnace CO2 He CEMS NH3 NO2 Emissions Ar NOx Electronics gas CO N2O Leak detection COe Gfx Combustion H2 IR Ammonia slip HCl GC Denox H2S TCD Portable CH4 ASU Industrial gases NO Hydrogen plants IG analyser N2 Hyco Industrial gas analyser NMHC Syngas Enriched oxygen analyser C3H6 Flammable gas Hazardous area
Product name
4900 Multigas AquaXact 1688 AquaXact Controller Chroma FID HFID MonoExact DF150E MonoExact DF310E MultiExact 4100 NanoChrome NOx Plasma PureGas SERVOPRO DF-550E SERVOPRO DF-560E SERVOPRO DF-560E ULTRA SERVOPRO DF-740 SERVOPRO DF-745 SERVOPRO DF-745 SGMax SERVOPRO DF-749 SERVOPRO DF-750 SERVOPRO DF-750 ULTRA SERVOPRO DF-760E SERVOPRO DF-760E ULTRA SERVOPRO MultiExact 4200 SERVOPRO NanoChrome ULTRA

4900 Multigas

SERVOPRO Safe Area

The 4900 Multigas is a high-performance CEMS analyzer designed for a wide range of multi-gas measurements.

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AquaXact 1688

SERVOPRO Safe Area

A rugged ultra-thin film Aluminum Oxide moisture sensor which measures moisture in a wide variety of gas phase process applications.

SERVOPRO AquaXact 1688
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AquaXact Controller

SERVOPRO Safe Area

Built specifically to work in harmony with the AquaXact 1688 ultra-thin film Aluminum Oxide moisture transmitter.

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Chroma

SERVOPRO Safe Area

The Chroma is optimized to specific background gases to ensure optimum performance for your application.

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FID

SERVOPRO Safe Area

With trace analysis capability, the FID is ideal for ASU safety and quality control applications.

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HFID

SERVOPRO Safe Area

Utilizes an internally heated oven set to 190°C (374°F) to maintain the sample gas above its dew point, for optimum performance in total hydrocarbon analysis (THC).

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MonoExact DF150E

SERVOPRO Safe Area

The MonoExact DF150E combines the reliability of Servomex’s tried and tested Coulometric oxygen sensor with a more user-friendly package.

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MonoExact DF310E

SERVOPRO Safe Area

Designed specifically for accurate measurements of oxygen in industrial gas (IG) applications.

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MultiExact 4100

SERVOPRO Safe Area

A high-performance multi-gas analyzer designed to provide up to four simultaneous gas stream measurements.

SERVOPRO MultiExact 4100
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NanoChrome

SERVOPRO Safe Area

Incorporating the latest advances in gas sensing and signal processing methodology, the NanoChrome revolutionizes ultra-trace purity measurements.

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NOx

SERVOPRO Safe Area

Measures NO or NO/NO2/NOx concentrations in industrial gas and vehicle emission applications.

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Plasma

SERVOPRO Safe Area

The Plasma delivers an accurate, highly stable and reliable measurement, with high sensitivity in the 0-1ppm range.

SERVOPRO Plasma
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PureGas

SERVOPRO Safe Area

A getter-based purification unit designed for the purification of carrier gases used in Gas Chromatography (GC) and other analytical applications

SERVOPRO PureGas
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SERVOPRO DF-550E

SERVOPRO Safe Area

An ultra-trace Coulometric oxygen analyzer, the DF-550E is optimized for quality measurements in ultra-high-purity electronic gases.

DF-550E an ultra-trace Coulometric oxygen analyzer.
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SERVOPRO DF-560E

SERVOPRO Safe Area

The DF-560E provides the semiconductor industry with industry-best oxygen (O2) measurements for quality control in ultra-high-purity (UHP) electronic grade gas.

DF-560E analyzer for industry-leading ultra-trace oxygen detection
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SERVOPRO DF-560E ULTRA

SERVOPRO Safe Area

A superior quality control solution for ultra-high-purity (UHP) electronic grade gases, the DF-560E Ultra delivers an industry-best detection of 45 parts per trillion for oxygen (O2).

SERVOPRO DF-560E ULTRA
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SERVOPRO DF-740

SERVOPRO Safe Area

A trace moisture analyzer using Tunable Diode Laser (TDL) sensing technology, the DF-740 is designed to measure contaminants in UHP-grade ammonia.

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SERVOPRO DF-745

SERVOPRO Safe Area

The DF-745 delivers trace and ultra-trace measurements of moisture for ultra-high-purity (UHP) electronic gas checks in LED/LCD manufacturing processes.

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SERVOPRO DF-745 SGMax

SERVOPRO Safe Area

The DF-745 SGMax is designed for the measurement of diverse gas mixtures in specialty gas blending applications.

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SERVOPRO DF-749

SERVOPRO Safe Area

Providing trace and ultra-trace moisture contaminant measurements in a variety of background gases, the DF-749 is ideal for quality checking of UHP gases used in LCD and LED manufacture.

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SERVOPRO DF-750

SERVOPRO Safe Area

The DF-750 is a trace/ultra-trace moisture analyzer optimized for measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

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SERVOPRO DF-750 ULTRA

SERVOPRO Safe Area

Delivering industry-leading trace/ultra-trace moisture measurements, the DF-750 ULTRA is optimized for quality monitoring in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

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SERVOPRO DF-760E

SERVOPRO Safe Area

Designed for quality control applications in UHP bulk gases, the compact DF-760E analyzer is a unique solution for the dual measurement of trace and ultra-trace moisture

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SERVOPRO DF-760E ULTRA

SERVOPRO Safe Area

Designed for industry-leading quality control measurements in UHP bulk gases, the compact DF-760E ULTRA is a unique dual-analysis solution for trace and ultra-trace moisture and oxygen.

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SERVOPRO MultiExact 4200

SERVOPRO Safe Area

The MultiExact 4200 analyzes up to four gases simultaneously for Syngas and HyCO

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SERVOPRO NanoChrome ULTRA

SERVOPRO Safe Area

Using proven ultra-trace sensing, the NanoChrome ULTRA conquers the most stringent demands of the semiconductor industry, delivering a cost-effective solution compared to competing technologies.

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