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Ultra-high purity (UHP) gases are essential for semiconductor manufacturing and the production of electronics such as LED and LCD displays. We provide a single-supplier solution for all UHP measurements in these applications.
Learn more about our range of solutions for applications using UHP gases. Download them now to stay informed.
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Learn more about our gas analysis solutions for UHP gas and semiconductor applications
Find out how we support semiconductor and ultra-high-purity gas processes
Discover how Servomex supports your ultra-high-purity gas and semiconductor applications
Manufacturing silicon wafers requires the use of ultra-pure gases to avoid contamination. Strict procedures, including multiple gas purification techniques, are used to ensure that ultra-high-purity gases are delivered to the manufacturing process. This requires accurate gas monitoring at very low levels of concentration.
Even the smallest impurities can cause major defects in a wafer, leading to costly scrap and waste. Quality control gas measurements are essential, but must cover all the impurities present. For example, adequate trace oxygen analysis will prevent oxidation and other reactions from affecting the process, but if trace-level moisture is missed, contamination will still occur. A comprehensive solution for all impurities is required, but this can lead to integration issues between hardware and software from different sources.
Our SERVOPRO DF500 and 700 NanoTrace ULTRA range of oxygen and moisture analyzers offers the lowest detection limits available to the industry, while the multi-gas SERVOPRO NanoChrome ULTRA provides the other trace impurity measurements required. These can be seamlessly integrated into existing systems or supplied as a turnkey Continuous Quality Control system designed to meet specific customer requirements.
We understand the world of semiconductor manufacture and electronics-grade gases. That’s why we’re able to provide the best solutions for your process, backed by application knowledge and expert support.
Our highly sensitive analyzers provide unmatched levels of detection for trace and ultra-trace impurities, including moisture and oxygen, in a wide range of background gases.
Combining our NanoChrome ULTRA multi-gas analyzer with the DF-560E ULTRA oxygen monitoring and the DF-700 ULTRA series moisture analyzers.
An international network of regional service personnel provides full support for our analyzers and systems, ensuring peak performance and reliability.
Responsible for planning Servomex future technologies, Claus is a highly experienced engineer who has worked at Servomex since 2004, leading the research and development of many new products. He is also a member of Servomex’s STEM program
Claus Agersbaek, Corporate Scientist
Based in the US Technical Center, Joseph works closely with customers in the semiconductor and industrial gas markets, providing expertise and product solutions to meet their requirements.
Joseph Ha, Market Segment Manager, P&S
Chris works closely with our customers, sales team and engineers to drive growth through applications and product development.
Chris Davis, Product Manager
A longtime Servomex expert with more than 33 years of service behind him, Phil has a vast knowledge of semiconductor market requirements, and provides technical and applications support for customers, colleagues and channel partners alike.
Phil Rogers, Senior Product Specialist, Semiconductor Sector
The DF-745 delivers trace and ultra-trace measurements of moisture for ultra-high-purity (UHP) electronic gas checks in LED/LCD manufacturing processes.
The DF-745 SGMax is designed for the measurement of diverse gas mixtures in specialty gas blending applications.
Providing trace and ultra-trace moisture contaminant measurements in a variety of background gases, the DF-749 is ideal for quality checking of UHP gases used in LCD and LED manufacture.
The DF-750 is a trace/ultra-trace moisture analyzer optimized for measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.
Delivering industry-leading trace/ultra-trace moisture measurements, the DF-750 ULTRA is optimized for quality monitoring in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.
Designed for quality control applications in UHP bulk gases, the compact DF-760E analyzer is a unique solution for the dual measurement of trace and ultra-trace moisture
Designed for industry-leading quality control measurements in UHP bulk gases, the compact DF-760E ULTRA is a unique dual-analysis solution for trace and ultra-trace moisture and oxygen.
Incorporating the latest advances in gas sensing and signal processing methodology, the NanoChrome revolutionizes ultra-trace purity measurements.
Using proven ultra-trace sensing, the NanoChrome ULTRA conquers the most stringent demands of the semiconductor industry, delivering a cost-effective solution compared to competing technologies.
Empower your ultra-high-purity (UHP) gas with Gen-7 of our SERVOPRO DF-500 series of Coulometric analyzers for ultra-trace oxygen measurements.
An ultra-trace Coulometric oxygen analyzer, the DF-550E is optimized for quality measurements in ultra-high-purity electronic gases.
A superior quality control solution for ultra-high-purity (UHP) electronic grade gases, the DF-560E Ultra delivers an industry-best detection of 45 parts per trillion for oxygen (O2).
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Stay up to date with the latest developments in UHP gas analysis, including all the latest product releases and application solutions.
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