Ultra-high purity (UHP) gases are essential for semiconductor manufacturing and the production of electronics such as LED and LCD displays. We provide a single-supplier solution for all UHP measurements in these applications.
Learn more about our range of solutions for applications using UHP gases. Download them now to stay informed.
Manufacturing silicon wafers requires the use of ultra-pure gases to avoid contamination. Strict procedures, including multiple gas purification techniques, are used to ensure that ultra-high-purity gases are delivered to the manufacturing process. This requires accurate gas monitoring at very low levels of concentration.
Even the smallest impurities can cause major defects in a wafer, leading to costly scrap and waste. Quality control gas measurements are essential, but must cover all the impurities present. For example, adequate trace oxygen analysis will prevent oxidation and other reactions from affecting the process, but if trace-level moisture is missed, contamination will still occur. A comprehensive solution for all impurities is required, but this can lead to integration issues between hardware and software from different sources.
Our SERVOPRO DF500 and 700 NanoTrace ULTRA range of oxygen and moisture analyzers offers the lowest detection limits available to the industry, while the multi-gas SERVOPRO NanoChrome ULTRA provides the other trace impurity measurements required. These can be seamlessly integrated into existing systems or supplied as a turnkey Continuous Quality Control system designed to meet specific customer requirements.
We understand the world of semiconductor manufacture and electronics-grade gases. That’s why we’re able to provide the best solutions for your process, backed by application knowledge and expert support.
Our highly sensitive analyzers provide unmatched levels of detection for trace and ultra-trace impurities, including moisture and oxygen, in a wide range of background gases.
Combining our NanoChrome ULTRA multi-gas analyzer with the DF-560E ULTRA oxygen monitoring and the DF-700 ULTRA series moisture analyzers.
An international network of regional service personnel provides full support for our analyzers and systems, ensuring peak performance and reliability.
Responsible for ensuring Servomex is a leading supplier of gas analyzers to the industrial gas and semiconductor markets, Dan has an excellent understanding of our customers’ strategic objectives.
Dan Johnson, Head of Product Management, P&S
Douglas is responsible for our SERVOPRO safe area analyzer range and the DF-500 series, overseeing the lifecycle of each product and ensuring they deliver customer satisfaction.
Douglas Barth, Senior Global Product Manager
As Service Manager for the Americas, Chris is responsible for the successful operation of our repair depots and field service groups throughout the region.
Chris Galley, Americas Service Manager
Based in Singapore, Chee Wee oversees our direct and channel sales teams in the region, and manages all Servomex sites and operations in Asia.
Chee Wee Yap, Asia Sales Director, Asia Site Leader
With a strong understanding of the emerging needs of customers resulting from ‘digital transformation’, Tony drives our strategy to deliver solutions and capabilities that meet those needs.
Tony Dodd, Head of Digital Architecture
Mark leads our global service teams to meet customer needs and exceed their expectations, promoting best practice and delivering the same high standards of service across the world.
Mark Calvert, Global Head of Service
A longtime Servomex expert with more than 33 years of service behind him, Phil has a vast knowledge of semiconductor market requirements, and provides technical and applications support for customers, colleagues and channel partners alike.
Phil Rogers, Senior Product Specialist, Semiconductor Sector
The 4900 Multigas is a high-performance CEMS analyzer designed for a wide range of multi-gas measurements.
A rugged ultra-thin film Aluminum Oxide moisture sensor which measures moisture in a wide variety of gas phase process applications.
Built specifically to work in harmony with the AquaXact 1688 ultra-thin film Aluminum Oxide moisture transmitter.
The Chroma is optimized to specific background gases to ensure optimum performance for your application.
An ultra-trace Coulometric oxygen analyzer, the DF-550E is optimized for quality measurements in ultra-high-purity electronic gases.
The DF-560E provides the semiconductor industry with industry-best oxygen (O2) measurements for quality control in ultra-high-purity (UHP) electronic grade gas.
A superior quality control solution for ultra-high-purity (UHP) electronic grade gases, the DF-560E Ultra delivers an industry-best detection of 45 parts per trillion for oxygen (O2).
The DF-730 is an ultra-trace moisture analyzer that monitors the electronics-grade, high-purity hydrogen chloride (HCl) gas used in semiconductor fabs.
A trace moisture analyzer using Tunable Diode Laser (TDL) sensing technology, the DF-740 is designed to measure contaminants in UHP-grade ammonia.
The DF-745 delivers trace and ultra-trace measurements of moisture for ultra-high-purity (UHP) electronic gas checks in LED/LCD manufacturing processes.
The DF-745 SGMax is designed for the measurement of diverse gas mixtures in specialty gas blending applications.
The DF-750 is a trace/ultra-trace moisture analyzer optimized for measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.
Delivering industry-leading trace/ultra-trace moisture measurements, the DF-750 ULTRA is optimized for quality monitoring in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.
Designed for quality control applications in UHP bulk gases, the compact DF-760E analyzer is a unique solution for the dual measurement of trace and ultra-trace moisture
Designed for industry-leading quality control measurements in UHP bulk gases, the compact DF-760E ULTRA is a unique dual-analysis solution for trace and ultra-trace moisture and oxygen.
With trace analysis capability, the FID is ideal for ASU safety and quality control applications.
Designed to measure O2 and COe in flue gases for improved combustion efficiency and reduced emissions.
A solid-state, non-consumable sensor configured to operate in process gas streams. Provides a direct hydrogen measurement that is not cross-sensitive to other gases.
Utilizes an internally heated oven set to 190°C (374°F) to maintain the sample gas above its dew point, for optimum performance in total hydrocarbon analysis (THC).
Unmatched installation flexibility plus cost and performance benefits, ready for fast, accurate and responsive measurements in combustion and process control.
Compact, high-performance Tunable Diode Laser (TDL) analyzer, specifically optimized for ammonia slip measurement
Optimized for the fast, accurate and responsive measurement of process oxygen (O2) in hot or hazardous conditions.
Designed for the measurement of oxygen (O2) in potentially flammable gas samples. Certified to Zone 0 and Zone 1 and suitable for measuring percent levels of O2.
A small sample volume portable benchtop analyzer focused on the checking and quality control of gas mixtures in Modified Atmosphere Packaging (MAP).
The MiniHD 5200 portable gas analyzer is a rugged, heavy duty analyzer designed to accurately measure the levels of O2, CO and CO2 within common gas mixtures.
The only truly portable battery-powered gas analyzer with MCERTS and TUV certification, offers single or dual measurement of oxygen (O2) and carbon dioxide (CO2).
The MonoExact DF150E combines the reliability of Servomex’s tried and tested Coulometric oxygen sensor with a more user-friendly package.
Designed specifically for accurate measurements of oxygen in industrial gas (IG) applications.
A high-performance multi-gas analyzer designed to provide up to four simultaneous gas stream measurements.
The MultiExact 4200 analyzes up to four gases simultaneously for Syngas and HyCO
Incorporating the latest advances in gas sensing and signal processing methodology, the NanoChrome revolutionizes ultra-trace purity measurements.
Using proven ultra-trace sensing, the NanoChrome ULTRA conquers the most stringent demands of the semiconductor industry, delivering a cost-effective solution compared to competing technologies.
Measures NO or NO/NO2/NOx concentrations in industrial gas and vehicle emission applications.
Designed to reliably measure up to 100% oxygen (O2) in many industrial applications, the Oxy 1800 is a stable, accurate O2 analyzer for safe area use.
The Oxy 1900 oxygen (O2) gas analyzer sets new standards of flexibility, stability and reliability from a single, cost-effective unit.
A life safety monitor designed for safe area or hazardous area environments, the OxyDetect delivers the superior performance of non-depleting Paramagnetic O2 sensing technology.
The high-specification OxyExact 2200 O2 analyzer offers an unrivaled combination of precision, flexibility and performance for optimum process and safety control.
The Plasma delivers an accurate, highly stable and reliable measurement, with high sensitivity in the 0-1ppm range.
A getter-based purification unit designed for the purification of carrier gases used in Gas Chromatography (GC) and other analytical applications
Flexible single and multicomponent gas analysis capability for corrosive, toxic and flammable sample streams.
A real-time optical analyzer utilizing the Precisive field-proven optical bench. A breakthrough capability in the continuous analysis of light hydrocarbons C1-C6.
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If you need more information, just get in touch. Our team is ready to provide the details you need to decide if our comprehensive UHP system or individual analyzers will meet your precise process requirements.