UHP Gases/Semiconductors

We have the complete solution for UHP gas purity monitoring

Ultra-high purity (UHP) gases are essential for semiconductor manufacturing and the production of electronics such as LED and LCD displays. We provide a single-supplier solution for all UHP measurements in these applications.

Resources for UHP gas analysis and semiconductor manufacturing

Learn more about our range of solutions for applications using UHP gases. Download them now to stay informed.

SERVOPRO MonoExact DF150E expert paper

SERVOPRO MonoExact DF150E expert paper

Servomex Systems Brochure

Servomex Systems Brochure

UHP Gases Magazine Issue 01

UHP Gases Magazine Issue 01

UHP Gases magazine Issue 02

UHP Gases magazine Issue 02

A high-purity process depends on effective analysis

Manufacturing silicon wafers requires the use of ultra-pure gases to avoid contamination. Strict procedures, including multiple gas purification techniques, are used to ensure that ultra-high-purity gases are delivered to the manufacturing process. This requires accurate gas monitoring at very low levels of concentration.

Even tiny impurities can seriously disrupt production

Even the smallest impurities can cause major defects in a wafer, leading to costly scrap and waste. Quality control gas measurements are essential, but must cover all the impurities present. For example, adequate trace oxygen analysis will prevent oxidation and other reactions from affecting the process, but if trace-level moisture is missed, contamination will still occur. A comprehensive solution for all impurities is required, but this can lead to integration issues between hardware and software from different sources.

We provide a comprehensive systems solution

Our SERVOPRO DF500 and 700 NanoTrace ULTRA range of oxygen and moisture analyzers offers the lowest detection limits available to the industry, while the multi-gas SERVOPRO NanoChrome ULTRA provides the other trace impurity measurements required. These can be seamlessly integrated into existing systems or supplied as a turnkey Continuous Quality Control system designed to meet specific customer requirements.

We’re experts in UHP gas analysis

We understand the world of semiconductor manufacture and electronics-grade gases. That’s why we’re able to provide the best solutions for your process, backed by application knowledge and expert support.

Industry-leading detection

Our highly sensitive analyzers provide unmatched levels of detection for trace and ultra-trace impurities, including moisture and oxygen, in a wide range of background gases.

A complete solution

Combining our NanoChrome ULTRA multi-gas analyzer with the DF-560E ULTRA oxygen monitoring and the DF-700 ULTRA series moisture analyzers.

Global service support

An international network of regional service personnel provides full support for our analyzers and systems, ensuring peak performance and reliability.

Meet the experts

Matt leads our expert Purity & Specialty team in providing products, knowledge
and service to the industrial, medical, UHP and semiconductor gas markets.

Matt Chambers, Business Unit Manager, Purity & Specialty

Responsible for managing our Chroma Business Unit, Claus is a highly experienced engineer who has worked at Servomex since 2004, leading the research and development of many new products. He is also a member of Servomex’s STEM program

Claus Agersbaek, Business Unit Manager, Chroma

Based in the US Technical Center, Joseph works closely with customers in the semiconductor and industrial gas markets, providing expertise and product solutions to meet their requirements.

Joseph Ha, Product Manager, Purity & Speciality

Chris works closely with our customers, sales team and engineers to drive growth through applications and product development.

Chris Davis, Product Manager

A longtime Servomex expert with more than 33 years of service behind him, Phil has a vast knowledge of semiconductor market requirements, and provides technical and applications support for customers, colleagues and channel partners alike.

Phil Rogers, Senior Product Specialist, Semiconductor Sector

Based in Singapore, Chee Wee oversees our direct and channel sales teams in the region, and manages all Servomex sites and operations in Asia.

Chee Wee Yap, Asia Sales Director, Asia Site Leader

Search Servomex UHP Gases / Semiconductors analyzers

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AquaXact 1688


A rugged ultra-thin film Aluminum Oxide moisture sensor which measures moisture in a wide variety of gas phase process applications.

SERVOPRO AquaXact 1688
  • Fast and accurate moisture measurements
  • Rugged ultra-thin film Aluminium Oxide sensor
  • Functions as a standalone 4-20mA transmitter
  • Remotely interfaces with compatible controller or analyser
  • Sensor element is NIST-traceable and field-replaceable
  • IP65-rated connector

AquaXact Controller


Built specifically to work in harmony with the AquaXact 1688 ultra-thin film Aluminum Oxide moisture transmitter.

  • Specifically designed to operate AquaXact 1688
  • High-clarity colour touchscreen display
  • Alarms, relays, and advanced communications
  • Allows easy sensor tip replacement in the field
  • Powerful, intuitive software control
  • Compact and easy to integrate into your system

DF-550E NanoTrace


An ultra-trace Coulometric oxygen analyzer, the DF-550E is optimized for quality measurements in ultra-high-purity electronic gases.

DF-550E an ultra-trace Coulometric oxygen analyzer.
  • An ultra-trace Coulometric oxygen analyser
  • For quality measurements in electronic gases
  • 200 parts-per-trillion Lower Detection Limit
  • Suitable for use with multiple background gases
  • Unaffected by sample and flow rate changes
  • Hand-carry portable option

DF-560E NanoTrace ULTRA


A superior quality control solution for ultra-high-purity (UHP) electronic grade gases, the DF-560E Ultra delivers an industry-best detection of 45 parts per trillion for oxygen (O2).

  • Delivers industry-best oxygen measurements
  • For quality control in ultra-high-purity gases
  • Lower Detection Limit of 45 parts-per-trillion
  • High-stability Coulometric sensing technology
  • Optimised for ease of use and portability
  • Cost-effective setup and configuration



The DF-745 delivers trace and ultra-trace measurements of moisture for ultra-high-purity (UHP) electronic gas checks in LED/LCD manufacturing processes.

  • Delivers trace/ultra-trace moisture measurements
  • For electronic gas checks in LED/LCD manufacturing
  • Can monitor multiple background gases
  • Lower Detection Limit of 1 part per billion
  • Designed for exceptional operational flexibility
  • Ultra-reliable baseline measurements

DF-745 SGMax


The DF-745 SGMax is designed for the measurement of diverse gas mixtures in specialty gas blending applications.

  • Optimized for speciality gas blending
  • Accurate TDL analysis of trace moisture
  • An adaptable solution for diverse applications
  • Lower Detection Limit of 5 parts per billion
  • Database of 17 standard background gases
  • Virtually eliminates dry down times



Providing trace and ultra-trace moisture contaminant measurements in a variety of background gases, the DF-749 is ideal for quality checking of UHP gases used in LCD and LED manufacture.

  • Trace/ultra-trace moisture measurements
  • Checks purity in UHP electronic gases
  • Easily portable for cart or mobile use
  • Lower Detection Limit of 250 parts per trillion
  • Factory-calibrated for quick and easy installation
  • Minimised ongoing maintenance needs



The DF-750 is a trace/ultra-trace moisture analyzer optimized for measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

  • A trace/ultra-trace moisture analyser
  • For purity checks in electronics-grade gases
  • Stable, highly accurate TDL measurements
  • 100ppt Lower Detection Limit
  • Low lifetime maintenance requirements



Delivering industry-leading trace/ultra-trace moisture measurements, the DF-750 ULTRA is optimized for quality monitoring in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

  • Delivers industry-best moisture measurements
  • Industry-leading 55 ppt Lower Detection Limit
  • Zero-drift stability extends calibration intervals
  • Measures in N2, H2, He, Ar and O2
  • Designed to meet exceptional gas purity standards



Designed for quality control applications in UHP bulk gases, the compact DF-760E analyzer is a unique solution for the dual measurement of trace and ultra-trace moisture

  • For quality control in UHP bulk gases
  • Dual moisture and oxygen analysis
  • Trace and ultra-trace measurements
  • Non-depleting Coulometric O2 sensor
  • Robust TDL moisture sensing
  • Exceptional Lower Detection Limits



Designed for industry-leading quality control measurements in UHP bulk gases, the compact DF-760E ULTRA is a unique dual-analysis solution for trace and ultra-trace moisture and oxygen.

  • Dual moisture/oxygen analyser for UHP gases
  • Ideal for quality checking and leak detection
  • Lower Detection Limit of 55ppt moisture
  • Oxygen Lower Detection Limit of 45ppt
  • Combines Coulometric and TDL sensing
  • Broad detection ranges



Incorporating the latest advances in gas sensing and signal processing methodology, the NanoChrome revolutionizes ultra-trace purity measurements.

  • Ultra-trace purity measurements in UHP gases
  • Designed for semiconductor manufacturing
  • Uses advanced Plasma Emission Detector sensor
  • Sensitive ProPeak software for high accuracy
  • Removes the need for flammable fuel gas
  • Comprehensive reporting and statistical analysis

NanoChrome ULTRA


Using proven ultra-trace sensing, the NanoChrome ULTRA conquers the most stringent demands of the semiconductor industry, delivering a cost-effective solution compared to competing technologies.

  • The top choice for ultra-trace purity measurements
  • Designed for the semiconductor wafer industry
  • Superior measurements of ultra-high-purity gases
  • Highly specific, non-depleting PED sensing
  • ProPeak filtering for highly sensitive measurements
  • Removes the need for flammable fuel gas
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The latest news in UHP gas analysis and semiconductor production

Stay up to date with the latest developments in UHP gas analysis, including all the latest product releases and application solutions.

Read the interactive version of our new ES magazine now

May 2020

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Available now: our new Coulometric-themed expert solutions magazine

April 2020

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Get the information we would have shared at Semicon Korea

February 2020

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Read the interactive version of our new Purity and Specialty magazine

January 2020

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Still not certain we can help? Talk to our experts

If you need more information, just get in touch. Our team is ready to provide the details you need to decide if our comprehensive UHP system or individual analyzers will meet your precise process requirements.

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