SERVOPRO NanoChrome ULTRA
UHP Gases/Semiconductors

We have the complete solution for UHP gas purity monitoring

Ultra-high purity (UHP) gases are essential for semiconductor manufacturing and the production of electronics such as LED and LCD displays. We provide a single-supplier solution for all UHP measurements in these applications.

Resources for UHP gas analysis and semiconductor manufacturing

Learn more about our range of solutions for applications using UHP gases. Download them now to stay informed.

DF-745 SGMax expert paper

DF-745 SGMax expert paper

ES Magazine Issue 25 Semicon

ES Magazine Issue 25 Semicon

SERVOPRO MonoExact DF150E expert paper

SERVOPRO MonoExact DF150E expert paper

SERVOPRO NanoChrome expert paper

SERVOPRO NanoChrome expert paper

A high-purity process depends on effective analysis

Manufacturing silicon wafers requires the use of ultra-pure gases to avoid contamination. Strict procedures, including multiple gas purification techniques, are used to ensure that ultra-high-purity gases are delivered to the manufacturing process. This requires accurate gas monitoring at very low levels of concentration.

Even tiny impurities can seriously disrupt production

Even the smallest impurities can cause major defects in a wafer, leading to costly scrap and waste. Quality control gas measurements are essential, but must cover all the impurities present. For example, adequate trace oxygen analysis will prevent oxidation and other reactions from affecting the process, but if trace-level moisture is missed, contamination will still occur. A comprehensive solution for all impurities is required, but this can lead to integration issues between hardware and software from different sources.

We provide a comprehensive systems solution

Our SERVOPRO DF500 and 700 NanoTrace ULTRA range of oxygen and moisture analyzers offers the lowest detection limits available to the industry, while the multi-gas SERVOPRO NanoChrome ULTRA provides the other trace impurity measurements required. These can be seamlessly integrated into existing systems or supplied as a turnkey Continuous Quality Control system designed to meet specific customer requirements.

We’re experts in UHP gas analysis

We understand the world of semiconductor manufacture and electronics-grade gases. That’s why we’re able to provide the best solutions for your process, backed by application knowledge and expert support.

Industry-leading detection

Our highly sensitive analyzers provide unmatched levels of detection for trace and ultra-trace impurities, including moisture and oxygen, in a wide range of background gases.

A complete solution

Combining our NanoChrome ULTRA multi-gas analyzer with the DF-560E ULTRA oxygen monitoring and the DF-700 ULTRA series moisture analyzers.

Global service support

An international network of regional service personnel provides full support for our analyzers and systems, ensuring peak performance and reliability.

Meet the experts

Doug Barth

Douglas is responsible for our SERVOPRO safe area analyzer range and the DF-500 series, overseeing the lifecycle of each product and ensuring they deliver customer satisfaction.

Douglas Barth, Senior Global Product Manager

As Service Manager for the Americas, Chris is responsible for the successful operation of our repair depots and field service groups throughout the region.

Chris Galley, Americas Service Manager

Based in Singapore, Chee Wee oversees our direct and channel sales teams in the region, and manages all Servomex sites and operations in Asia.

Chee Wee Yap, Asia Sales Director, Asia Site Leader

With a strong understanding of the emerging needs of customers resulting from ‘digital transformation’, Tony drives our strategy to deliver solutions and capabilities that meet those needs.

Tony Dodd, Head of Digital Architecture

Mark leads our global service teams to meet customer needs and exceed their expectations, promoting best practice and delivering the same high standards of service across the world.

Mark Calvert, Global Head of Service

A longtime Servomex expert with more than 33 years of service behind him, Phil has a vast knowledge of semiconductor market requirements, and provides technical and applications support for customers, colleagues and channel partners alike.

Phil Rogers, Senior Product Specialist, Semiconductor Sector

Servomex analyzer finder

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AquaXact 1688

SERVOPRO Safe Area

A rugged ultra-thin film Aluminum Oxide moisture sensor which measures moisture in a wide variety of gas phase process applications.

SERVOPRO AquaXact 1688
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AquaXact Controller

SERVOPRO Safe Area

Built specifically to work in harmony with the AquaXact 1688 ultra-thin film Aluminum Oxide moisture transmitter.

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NanoChrome

SERVOPRO Safe Area

Incorporating the latest advances in gas sensing and signal processing methodology, the NanoChrome revolutionizes ultra-trace purity measurements.

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OxyDetect

Gas Detection

A life safety monitor designed for safe area or hazardous area environments, the OxyDetect delivers the superior performance of non-depleting Paramagnetic O2 sensing technology.

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SERVOPRO DF-550E

SERVOPRO Safe Area

An ultra-trace Coulometric oxygen analyzer, the DF-550E is optimized for quality measurements in ultra-high-purity electronic gases.

DF-550E an ultra-trace Coulometric oxygen analyzer.
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SERVOPRO DF-560E

SERVOPRO Safe Area

The DF-560E provides the semiconductor industry with industry-best oxygen (O2) measurements for quality control in ultra-high-purity (UHP) electronic grade gas.

DF-560E analyzer for industry-leading ultra-trace oxygen detection
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SERVOPRO DF-560E ULTRA

SERVOPRO Safe Area

A superior quality control solution for ultra-high-purity (UHP) electronic grade gases, the DF-560E Ultra delivers an industry-best detection of 45 parts per trillion for oxygen (O2).

SERVOPRO DF-560E ULTRA
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SERVOPRO DF-740

SERVOPRO Safe Area

A trace moisture analyzer using Tunable Diode Laser (TDL) sensing technology, the DF-740 is designed to measure contaminants in UHP-grade ammonia.

The DF-740- designed specifically to monitor trace levels of moisture in electronics-grade ammonia (NH3)
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SERVOPRO DF-745

SERVOPRO Safe Area

The DF-745 delivers trace and ultra-trace measurements of moisture for ultra-high-purity (UHP) electronic gas checks in LED/LCD manufacturing processes.

DF745 Trace/ultra-trace moisture measurement of UHP gases
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SERVOPRO DF-745 SGMax

SERVOPRO Safe Area

The DF-745 SGMax is designed for the measurement of diverse gas mixtures in specialty gas blending applications.

DF-745 SGMax moisture analyzer
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SERVOPRO DF-749

SERVOPRO Safe Area

Providing trace and ultra-trace moisture contaminant measurements in a variety of background gases, the DF-749 is ideal for quality checking of UHP gases used in LCD and LED manufacture.

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SERVOPRO DF-750

SERVOPRO Safe Area

The DF-750 is a trace/ultra-trace moisture analyzer optimized for measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

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SERVOPRO DF-750 ULTRA

SERVOPRO Safe Area

Delivering industry-leading trace/ultra-trace moisture measurements, the DF-750 ULTRA is optimized for quality monitoring in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.

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SERVOPRO DF-760E

SERVOPRO Safe Area

Designed for quality control applications in UHP bulk gases, the compact DF-760E analyzer is a unique solution for the dual measurement of trace and ultra-trace moisture

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SERVOPRO DF-760E ULTRA

SERVOPRO Safe Area

Designed for industry-leading quality control measurements in UHP bulk gases, the compact DF-760E ULTRA is a unique dual-analysis solution for trace and ultra-trace moisture and oxygen.

DF-760E NanoTrace ULTRA analyzer
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SERVOPRO NanoChrome ULTRA

SERVOPRO Safe Area

Using proven ultra-trace sensing, the NanoChrome ULTRA conquers the most stringent demands of the semiconductor industry, delivering a cost-effective solution compared to competing technologies.

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The latest news in UHP gas analysis and semiconductor production

Stay up to date with the latest developments in UHP gas analysis, including all the latest product releases and application solutions.

Read the interactive version of our new ES magazine now

May 2020

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Available now: our new Coulometric-themed expert solutions magazine

April 2020

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Get the information we would have shared at Semicon Korea

February 2020

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Read the interactive version of our new Purity and Specialty magazine

January 2020

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Still not certain we can help? Talk to our experts

If you need more information, just get in touch. Our team is ready to provide the details you need to decide if our comprehensive UHP system or individual analyzers will meet your precise process requirements.


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