SERVOPRO DF-700 Series

Next-generation reliability from the latest in trace and ultra-trace moisture analysis

Gen-7 of our SERVOPRO DF-700 NanoTrace Series of Tunable Diode Laser analyzers is even more reliable than before, with a new, all-digital design and solid-state storage.

They deliver accurate trace and ultra-trace measurements for moisture – or both moisture and oxygen – that are trusted by UHP gas producers globally, with industry-leading lower detection limits.

Industry-leading gas sensing

Gen-7 analyzers are built around Servomex’s trusted digital sensing technologies for proven reliability, ease of operation, and minimal maintenance.

Tunable Diode Laser

Measure moisture down to 55ppt

Powered by Tunable Diode Laser (TDL) Spectroscopy technology, the Laser Moisture sensor has a robust, simple, and low-maintenance design that delivers outstanding non-contact measurement performance.

Coulometric

Oxygen analysis with Coulometric sensing

Delivering an industry-best measurement of oxygen, our highly sensitive, non-depleting Coulometric sensor does not need periodic replacement and avoids the false low readings associated with fuel cell sensors

Take trace and ultra-trace analysis to the next level

With a more stable, all-digital design and improved field serviceability, the Gen-7 upgrade raises the bar for impurity detection in the ultra-high-purity (UHP) gases used in the semiconductor and electronic-grade gas industries.

Easy to use and maintain

The redesigned Gen-7 range of DF-700 Series analyzers has a bigger screen and larger buttons, making it more user-friendly and easier to operate. The simplified digital design is easier to maintain and improves field serviceability. Combined with non-depleting sensor technology and extended calibration intervals, the Gen-7 analyzers offer a low lifetime cost of ownership with minimal ongoing maintenance requirements.

All-digital reliability

Delivering the same accurate trace and ultra-trace measurements for moisture – or both moisture and oxygen – that are trusted by UHP gas producers globally, the Gen-7 range of DF-700 Series analyzers is now more stable than ever before. The all-digital design includes a long-life solid-state drive and improved filter, for increased reliability, ensuring it is ready to face future challenges for years to come.

No-compromise performance

Specifically designed to meet the demanding standards of the semiconductor and electronics gas industries worldwide, the DF-700 range delivers next-generation reliability through its new Gen-7 upgrade. With industry-leading Lower Detection Limits and reliable accurate measurements, they combine superior, easy-to-use performance with a relatively low cost of ownership, providing end-users with advanced, cost-effective solutions for their UHP gas applications.

Trace moisture measurements of ammonia gas for LED plants

The DF-740 is designed specifically to monitor trace levels of moisture in electronics-grade ammonia (NH3) used in LED plants, with an exceptionally broad measurement range of 10ppb-10ppm.

Designed for long-term unattended operation, the DF-740 delivers considerable cost savings and a consistent, accurate measurement with a rapid response to changing conditions.

The high-stability optical TDL technology and robust Herriott Cell require minimal ongoing maintenance, with zero drift enabling greatly extended calibration intervals.

Mike Proctor
Mike Proctor
Business Unit Director, P&S
Moisture monitoring for UHP gas checks in LED/LCD manufacturing

Able to monitor multiple background gases, the DF-745 provides trace and ultra-trace moisture contaminant measurements for LED/LCD manufacturing processes.

Combining exceptional performance with an intelligent, compact design for operational flexibility, the analyzer can be moved easily from port to port, virtually eliminating the dry-down times often associated with these applications.

Offering a Lower Detection Limit (LDL) of 1 part-per-billion (ppb), the DF-745 delivers ultra-reliable baseline measurements, a fast speed of response, and a low cost of lifetime ownership.

Dan Johnson

Director of Product Management, P&S

Mike Proctor
Mike Proctor
Business Unit Director, P&S
A flexible solution optimized for specialty gas blending

Designed for the measurement of diverse gas mixtures in specialty gas blending applications, the DF-745 SGMax is an adaptable solution that meets a diverse range of application needs.

Intelligent integrated software includes a database of 17 standard background gases – with blends of up to eight gases, ensuring 30 custom gas mixtures can be predefined directly via the front panel interface.

The robust SGMax can be moved easily from port to port, virtually eliminating dry-down times often associated with these applications.

Mike Proctor
Mike Proctor
Business Unit Director, P&S
The DF-749 monitors moisture 
in electronic-grade UHP gases

Ideal for quality checking of the UHP gases used in LCD and LED manufacture, the DF-749 provides trace and ultra-trace moisture contaminant measurements in a variety of background gases, including nitrogen, hydrogen, helium, argon, and oxygen.

Its compact, robust design makes it easily portable for easy cart or mobile use and virtually eliminates the dry-down times often associated with UHP gas checking.

Using industry-leading TDL sensing technology, the DF-749 delivers ultra-reliable baseline measurements and a fast speed of response, with a Lower Detection Limit (LDL) of 250ppt.

Mike Proctor

Business Unit Director, P&S

Mike Proctor
Mike Proctor
Business Unit Director, P&S
Leading moisture analysis for the semiconductor industry

Designed specifically for trace and ultra-trace moisture measurements in a range of UHP gases, the DF-750 is optimized for quality control applications in 300mm semiconductor fabs.

Delivering an industry-leading 100 parts-per-trillion (ppt) Lower Detection Limit (LDL), it measures moisture as a contaminant in the electronic-grade gases nitrogen, hydrogen, helium, argon, and oxygen.

Tunable Diode Laser (TDL) sensing technology ensures the robust DF-750’s stable, highly accurate measurements meet the precise monitoring needs of semiconductor production.

Mike Proctor
Mike Proctor
Business Unit Director, P&S
The first choice for moisture analysis in the semiconductor industry

Providing industry-best measurements for 300mm semiconductor fabs, the DF-750 ULTRA measures moisture as a contaminant in the electronic-grade gases nitrogen, hydrogen, helium, argon, and oxygen.

TDL sensing technology delivers an industry-leading 55 parts-per-trillion (ppt) Lower Detection Limit (LDL), ensuring the DF-750 ULTRA’s stable, highly accurate measurements meet the precise monitoring needs of semiconductor production.

A low cost-of-ownership combined with exceptional measurement performance means that the DF-750 ULTRA is the first-choice analytical solution for UHP gas quality checks.

Mike Proctor
Mike Proctor
Business Unit Director, P&S
Dual moisture and oxygen analysis for UHP bulk gases

Designed for quality control applications in the UHP bulk gases used in the manufacture of integrated circuit boards, the DF-760E is a unique solution for the dual measurement of trace and ultra-trace moisture (H2O) and oxygen (O2).

Combining the industry-leading properties of our non-depleting Coulometric sensor and robust TDL technology in a compact integrated unit, the DF-760E measures ultra-low contaminant levels of H2O and O2 within background gas blends of nitrogen, hydrogen, helium, O2, and argon (H2O in O2 only).

Mike Proctor
Mike Proctor
Business Unit Director, P&S
A superior solution for dual moisture and oxygen analysis in UHP gases

Delivering quality control measurements for UHP bulk gases used in the manufacture of integrated circuit boards, the compact DF-760E NanoTrace ULTRA analyzer is the industry-leading solution for the dual measurement of trace and ultra-trace moisture and oxygen.

It combines the exceptional performance of our non-depleting Coulometric sensor and robust TDL technology within a single compact unit, ensuring a fast speed of response and unsurpassed stability.

Lower Detection Limits (LDL) of 55ppt (H2O) and 45ppt (O2) make it ideal for quality checking and leak detection in semiconductor fab applications.

Mike Proctor
Mike Proctor
Business Unit Director, P&S

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