When your processes need high purity gas measurements for oxygen and moisture, DF analyzers deliver industry-leading performance that reaches down to the very lowest ultra-trace levels.
Utilizing the exceptional sensing capabilities of Servomex’s coulometric and TDL sensing technologies for the measurement of oxygen and moisture respectively, DF analyzers are optimized for a sensitive and stable analysis at ppm, ppb and ppt levels.
Delivered through four product types - the DF-100 analogue oxygen series, DF-300 digital oxygen series, DF-500 ultra-trace oxygen series and DF-700 moisture series - DF products are the recognized standard for ultra-low measurements in the semiconductor, specialty gas, industrial gas and hydrocarbon processing industries.
Leading ultra-middleweight oxygen analyzer designed for monitoring ppt level semiconductor UHP gas
Ultra-trace coulometric Oxygen measurements in ultra-high purity electronic grade gas for quality control
Ultra-trace moisture analyzer monitors high-purity HCl used in semiconductor fabs
Trace moisture analyzer designed to measure contaminants in UHP-grade ammonia
Trace / ultra-trace moisture measurement of UHP gases used in LED manufacturing
Optimized for special gas applicationsLDL（the limit of detection）trace level moisture analyzer
Trace / ultra-trace moisture measurements for UHP gases used in LCD/LED manufacture
Trace / ultra-trace moisture measurements of UHP gases used in 300mm semicon fabs
Unique ultra-trace dual measurement of moisture and oxygen, ideal for PCB bulk gases