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Key features
  • Comprehensive solution for ultra-trace H2, CH4, CO, CO2 and NMHC in a wide range of common background gases including He, H2, N2, Ar and O2
  • A complete stand-alone UHP gas analysis solution when combined with DF-500 and DF-700 analyzers
  • Flexible communication options including Ethernet and 4-20 mA output 
Easy to use
Low cost of ownership
Unrivalled Performance
Benchmark compliance

The NanoChrome is a high-performance analyzer specifically designs for the semiconductor manufacture industry, offering ultra-trace, highest reliability monitoring of Ar, N2, H2, CH4, CO, CO2 and NMHC in a wide range of common background gases including He, H2, N2, Ar and O2.

Updated with a larger display and the latest software, the NanoChrome uses an advanced Plasma Emission Detector (PED) sensor and sensitive ProPeak software, both specially developed by Servomex.

This sensing technology provides considerable advantages over traditional Flame Ignition Detector (FID) and Reduction Gas Detection (RGD) sensors in terms of performance, stability, safety and ability to reduce on-going costs.

Servomex’s advanced signal recovery uses patented ProPeak filtering methods to deliver a highly sensitive and selective measurement you can rely on. With no need for a methanizer or requirement for flammable fuel gas, the NanoChrome also offers appreciable cost benefits.

Updated software ensures increased security and stability, with a robust, Windows 10-based operating system. The NanoChrome is also easier to use, with a large, clear display screen.

When used with the Servomex DF-500 ultra-trace oxygen and DF-700 moisture series analyzers, the NanoChrome fulfils a unique total analysis solution for UHP gas monitoring.

  • 482mm (18.9”) Wide x 117mm (4.6”) High x 600mm (23.6”) Deep 
  • 11-27kg (25-60lb) applications dependent
  • In compliance with EMC Directives, rated for Overvoltage Category II and Pollution Degree 2 

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Key Applications
  • Semiconductor Production - Quality Control Measurements
  • Semiconductor Production - Stationary Analytical Systems
Service and Spares

Ensure your SERVOPRO NanoChrome UHP gas analyzer delivers optimum performance with Servomex Service Network.

Through our global network of engineers and service centers, we provide complete lifetime support for your analyzer. Our services range from installation and commissioning to supplying high quality spares and arranging scheduled servicing: visit our Service Network pages to find out more.

Spares lists for the NanoChrome are available by clicking on the Downloads tab.

Global Service Network