The DF-750 is a trace/ultra-trace moisture analyzer optimized for measurements in the ultra-high-purity (UHP) gases used in 300mm semiconductor fabs.
Designed specifically to make trace and ultra-trace moisture measurements in a range of UHP gases, the DF-750 is optimized for 300mm semiconductor fabs. It measures moisture as a contaminant in the electronics grade gases nitrogen, hydrogen, helium, argon and oxygen.
Tunable Diode Laser (TDL) sensing technology delivers an industry-leading 100 parts-per-trillion (ppt) Lower Detection Limit (LDL), ensuring the DF-750’s stable, highly accurate measurements meet the precise monitoring needs of semiconductor production.
The robust DF-750 has low lifetime maintenance requirements and delivers zero-drift stability, greatly extending calibration intervals. This low cost- of-ownership combined with exceptional measurement performance means that the DF-750 is the first-choice analytical solution for UHP gas quality checks.
Ultra-trace qualification of UHP electronic gases is essential for semiconductor fabrication. You need a moisture analyzer
that can deliver high stability measurements with sensitive and consistent performance. An accurate and low LDL is a must, as is the need to easily store and recall data/calibration records. No matter what your requirements, you’ll want a moisture analyzer that can provide operational efficiencies. We don’t believe you should
have to compromise.
The DF-750 is designed to meet the exceptional gas purity standards demanded by semiconductor manufacturers worldwide. Utilizing leading-edge TDL sensing technology, housed in a robust and resilient Herriot Cell, the DF-750 avoids moisture contact with optical sensing components. The result is an analyzer that delivers an ultra-sensitive, industry-leading 100ppt Lower Detection Limit, ideal for checking for minute levels of moisture in a wide range of UHP electronics grade
gases, including N2, H2, He, Ar and O2. With data recorded and readily available through flexible storage and recall functions, the DF-750 is the complete solution for UHP gas monitoring in 300mm semiconductor fabs.
If you’re looking for a gas analysis system, our expert team provides the design, build and installation capabilities you’re looking for. With a collaborative approach and project management from start to finish, we’ll ensure you get the system that meets your exact process requirements.
It’s easy to find the product you need for your application with Servomex
Get in touch to tell us what you need and the application you plan to use it for
Our expert team will help you select the right product package, ensuring you have the accessories and support to get the best performance from your analyzer
Your analyzer will be assembled in one of our state-of-the-art engineering centers and rapidly dispatched to your site
With low maintenance requirements and zero-drift stability, the DF-750 provides high-specification measurement performance for a low cost of ownership.
Calibration, system error and measurement data facilitates archiving of operational history for the DF-750.
With an exceptionally low 100ppt LDL, the DF-750 delivers the sensitivity and precision demanded by the semiconductor production industry.
By minimizing water contact with optical components, the DF-750’s repeatable baseline measurements are unaffected by loss in mirror reflectivity, ensuring accuracy and stability.
Using industry-leading, non-depleting, high stability TDL trace sensing with zero drift, the DF-750 measures moisture at trace and ultra-trace levels in electronics grade gases.
| Gas | Measurement |
|---|---|
| Water Vapour (Moisture) () | , , |
Technologies
“For in-depth specifications you’ll want to download our technical datasheet which includes information on technology, performance, operating environment, sample conditions and compliance along with technical drawings and top-level benefits and applications.”
We have compiled a comprehensive DF-750 resource package, which you can download all at once. Download now to learn more about product features, advantages and technical specifications.
The DF-750 is designed to measure moisture in UHP gases and is the leading choice for semiconductor industry applications.
Bulk gas quality control checks for UHP electronic gases used in 300mm semiconductor fabs | Leak detection checks for UHP electronic gases used in 300mm semiconductor fabs
