Industry-leading UHP gas analysis in a cost-effective system

Our ULTRA Series of high-purity gas analyzers sets the industry standard for high-performance UHP gas applications, including semiconductor manufacturing.

Innovative and cost-effective, they deliver industry-leading results that meet – and often exceed – the demands of modern industrial gas applications.

Built around our proven digital sensing technologies, these analyzers are easy to use and maintain, and provide a complete UHP gas analysis solution that offers far better value than competing technologies.

The ULTRA series consists of four products:

  • SERVOPRO DF-560E NanoTrace ULTRA – Coulometric analyzer for trace-level oxygen measurements and an industry-leading lower detection limit of 45 parts per trillion (ppt)
  • SERVOPRO DF-750 NanoTrace ULTRA – Laser Moisture analyzer that provides an outstanding lower detection limit of 55ppt
  • SERVOPRO DF-760E NanoTrace ULTRA – combined Coulometric and Laser Moisture analyzer delivering dual measurements for O2 and moisture with unmatched lower detection limits
  • SERVOPRO NanoChrome ULTRA – multi-gas analyzer with lower detection limits down as low as 100ppt

Learn how the ULTRA Series provides industry-leading analysis for your process: Click here

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