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The NanoChrome ULTRA delivers superior ultra-trace measurements of UHP gases

The number one choice for ultra-trace purity measurements in the semiconductor industry, the revolutionary NanoChrome ULTRA incorporates the latest advances in gas sensing and signal processing methodology, for superior performance.

Reliable UHP monitoring

A high-performance analyzer specifically designed for the semiconductor manufacturing industry, the NanoChrome ULTRA offers the highest reliability monitoring of argon (Ar), methane (CH4), carbon monoxide (CO), carbon dioxide (CO2), hydrogen (H2), nitrogen (N2) and non-methane hydrocarbons (NMHC) in a wide range of common background gases including Ar, H2, helium (He), N2 and oxygen (O2).

Updated with a larger display and the latest software, the NanoChrome ULTRA uses an advanced Plasma Emission Detector (PED) sensor and sensitive ProPeak software, both specially developed by Servomex.

Chris Davis
Chris Davis
Product Manager
The revolutionary NanoChrome ULTRA for ultra-trace purity measurements

High-performance at a lower cost

The NanoChrome ULTRA’s sensing technology provides considerable advantages over traditional Flame Ionization Detector (FID) and Reduction Gas Detection (RGD) sensing technologies in terms of performance, stability, safety and ability to reduce on-going costs.

Servomex’s advanced signal recovery uses patented ProPeak filtering methods to deliver a highly sensitive and selective measurement you can rely on. With no need for a methanizer or requirement flammable fuel gas, the NanoChrome ULTRA also delivers appreciable cost benefits.

The definitive solution for UHP gas monitoring applications

When monitoring UHP gases used in semiconductor wafer manufacture, the highest sensitivity and performance is essential. A suitable analytical solution must offer the flexibility to monitor all required gases in common background gases – and do so with complete selectivity and accuracy at ultra-trace levels. No matter your application needs, you’ll want a solution that can reduce ongoing costs and help you leverage business efficiencies. We don’t believe you should have to compromise.

A no-compromise solution

The NanoChrome ULTRA is a game-changing analyzer that provides the highest level of performance accuracy and selectivity currently available. Using leading-edge, patented PED sensing technology,
this device delivers notable advantages over comparable analysis techniques. Not only is it highly specific to the gases being measured in diverse gas streams, it also removes the need for flammable fuel gas – allowing the NanoChrome ULTRA to deliver an enhanced-safety solution. When a complete, stand-alone solution is demanded, NanoChrome ULTRA can be combined with the DF-500 (ultra-trace ppt O2) and DF-700 (ultra-trace moisture) analyzer series.

Simple maintenance and reduced ongoing costs

By combining Servomex’s specially developed non-depleting PED technology with advanced new processing and operational software, the NanoChrome ULTRA allows calibration periods to be extended, helping to reduce on-going costs considerably over product life. The addition
of intelligent signal processing ensures this device offers the highest grade of accuracy, maximizing process uptime. Comprehensive digital communications protocols and access via a network or internet browser facilitate flexible remote device interaction, while an intelligent software package provides the ability to generate comprehensive reporting and statistical analysis. This makes the NanoChrome ULTRA the analyzer to which all other UHP gas monitoring analyzers will be compared.

Man with Servomex System components

The NanoChrome ULTRA is part of our total systems solution for UHP analysis

If you’re looking to build a UHP gas analysis system, with the seamless integration that comes from using a single supplier, we can help. Contact our expert systems team to learn more.

Ready to buy? Here’s how it works

It’s easy to find the product you need for your application with Servomex

Servomex UK technical center


Get in touch to tell us what you need and the application you plan to use it for

Servomex Gas System Schematics


Our expert team will help you select the right product package, ensuring you have the accessories and support to get the best performance from your analyzer

Woman Assembling Sensors


Your analyzer will be assembled in one of our state-of-the-art engineering centers and rapidly dispatched to your site

The highest reliability for UHP gas monitoring

The revolutionary NanoChrome ULTRA delivers significant benefits to the semiconductor industry, as a standalone device or as part of Servomex’s total solution for UHP gases

Benchmark compliance

The NanoChrome ULTRA is compliant with Low Voltage, EMC and applicable Directives.

PED sensor technology

The highly sensitive Plasma Emission Detector eliminates the use of FID or RGD detectors, with their associated safety issues and high costs of ownership.

Integrated computer with advanced software

Each analyzer has unique Pro-Peak software and a robust, Windows 10-based operating system for increased security and stability. A fully automated system and large display screen simplifies operation.


  • Comprehensive solution for ultra-trace H2, CH4, CO, CO2 , N2, Ar and NMHC in a wide range of common background gases including He, H2, N2, Ar and O2
  • A complete stand-alone UHP gas analysis solution when combined with DF-500 and DF-700 analyzers
  • Digital communications for remote access: Internet/Ethernet and RS232 

Easy to use

  • Comprehensive report monitoring software for full access to chromatograms, process results, statistics and historical values
  • Internal dilution system option
  • No requirement for flammable fuel gas, improving safety and simplifying installation

Low cost of ownership

  • Non-depleting sensor and intelligent software extends calibration intervals
  • No need for methaniser or consumable fuel gas
  • Cost-effective and simplified ongoing maintenance

Unrivalled Performance

  • Innovative high-sensitivity Plasma Emission Detector (PED) enables ultra-trace measurements of Ar, N2, H2, CH4, CO, CO2 and NMHC
  • ProPeak peak detection technique enables unprecedented measurement sensitivity
  • Direct Analysis Methodology removes uncertainties of FID and RGD measurements

The NanoChrome ULTRA measures the gases below in common background gases at ultra-trace levels, for the highest reliability in purity monitoring.

Gas Measurement
Argon (Ar)ppb, ppt
Methane (CH₄)ppb, ppt
Carbon monoxide (CO)ppb, ppt
Carbon dioxide (CO₂)ppb, ppt
Hydrogen (H₂)ppb, ppt
Nitrogen (N₂)ppb, ppt
Non-methane hydrocarbons (NMHC)ppb, ppt
Oxygen (O₂)ppb, ppt


Gas Chromoatography Plasma
The revolutionary NanoChrome ULTRA for ultra-trace purity measurements


In compliance with EMC Directives, rated for Overvoltage Category II and Pollution Degree 2

Schematic (select to expand)


482mm (18.9”) Wide x 117mm (4.6”) High x 600mm (23.6”) Deep


11-27kg (25-60lb) applications dependent

Get the detailed specifications

“For in-depth specifications you’ll want to download our technical datasheet which includes information on technology, performance, operating environment, sample conditions and compliance along with technical drawings and top-level benefits and applications.”

Chris Davis
Chris Davis
Product Manager

Download this great resource pack to get everything you need to know

“Our NanoChrome ULTRA resource pack contains all the information you need to discover how the analyzer can enhance your process performance, including the product brochure and operator manual.”

Chris Davis
Chris Davis
Product Manager

Manuals and brochures

Download the brochure for this product to find out how it is installed and operated. You’ll also discover its features and benefits, and get all the technical data you need.

SERVOPRO NanoChrome ULTRA Operator Manual

SERVOPRO NanoChrome ULTRA Operator Manual

SERVOPRO NanoChrome ULTRA- Quick Start Guide

SERVOPRO NanoChrome ULTRA- Quick Start Guide

ES Magazine Issue 25 Semicon

ES Magazine Issue 25 Semicon

SERVOPRO NanoChrome ULTRA Product brochure

SERVOPRO NanoChrome ULTRA Product brochure

See for yourself

Our videos give you the chance to watch our products in action and hear from our experts. You can also see our analyzers unboxed, and find out more about our solutions for key applications

Unboxed: the SERVOPRO NanoChrome

Our experts Chris Davis and Roberto Alzaga unbox this analyzer

The SERVOPRO NanoChrome

Find out about our high-performance analyzer for the semiconductor industry

Total UHP Solutions

See our unique single-supplier solution for UHP gases

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