Learn more about our expert team, key divisions and how they provide solutions for a wide array of industrial markets.
With a broad product portfolio, we have the best-fit technologies to meet your application needs.
Our stable, reliable gas analysis solutions measure over 20 gases with industry-leading accuracy and stability.
Our expertise and single-supplier solutions help improve an extensive range of industrial processes.
We offer accurate and reliable gas analysis for hazardous and safe area applications, including ultra-low detection and portable products.
Find the right gas analysis solution for your process. Our finder allows you to select by key parameters including the gas sensed, the technology used, and the measurement needed.
Looking for details on an out-of-production analyzer? Find all the information you need for support here.
From a single analyzer with sampling system to an air-conditioned shelter, our expert team can deliver scalable solutions to meet your process needs.
We provide service products customized to meet your precise process uptime requirements.
To report a fault for a product under warranty, fill in the form here for a timely response.
Get the high-quality, authorized spare parts and consumables you need, with rapid delivery.
Our brochures detail the appropriate spares resources available for your gas analyzer.
Servomex is committed to a sustainable approach towards people and operations across our organization.
Our global business is built on an essential set of values that underpin our work, decision-making, and culture.
Become a valued part of the Servomex team and forge your career path with the global leaders in gas analysis.
Learn about the roles of some of our key people and find out what made them choose to work at Servomex.
If you want a career with meaning, working with the best global talent, check out our latest vacancies.
We have career paths to suit every level, from apprentices and graduates to experienced leadership roles.
Search through our full range of magazines, videos, manuals, white papers, and more to find the information you need.
Search by category to get more information from our extensive range of product and application resources.
Stay up to date with the latest from Servomex and the world of gas analysis, including new product releases and industry events.
The DF-560E delivers industry-leading ultra-trace oxygen detection
With a Lower Detection Limit (LDL) of 45 parts-per-trillion (ppt), the DF-560E provides the semiconductor industry with industry-best oxygen (O2) measurements for quality control in ultra-high-purity (UHP) electronic grade gas.
It’s easy to find the product you need for your application with Servomex
Get in touch to tell us what you need and the application you plan to use it for
Our expert team will help you select the right product package, ensuring you have the accessories and support to get the best performance from your analyzer
Your analyzer will be assembled in one of our state-of-the-art engineering centers and rapidly dispatched to your site
Designed to measure ultra-trace O2 to the very lowest levels, the DF-560E delivers the semiconductor industry an industry-leading 45ppt LDL. Flexible and adaptable, it is able to monitor O2 in multiple background gases while logging data in a variety of formats.
The DF-560E negates the effects of upset-prone applications, thanks to Servomex’s high-stability Coulometric sensing technology, which delivers a fast speed of response in the presence of sample and flow rate changes.
Ideal for semiconductor fabs and analytical carts, the DF-560E is optimized for ease of use and portability. Operation is made via the front panel or digital communications, while hand-carry options make it easy to transport.
The DF-560E also reduces operational costs through its non-depleting, factory-calibrated Coulometric technology, providing cost-effective setup and configuration. The only ongoing maintenance requirement is an annual span calibration, with no programmable cell replacement needed.
When you require the measurement of ultra-trace oxygen as a contaminant, either for quality control or leak detection purposes, you need a gas analyzer that delivers performance, stability and reliability. The lowest LDL is essential, as is the ability to carry out consistent, high stability measurements in upset prone applications, where sample and flow rate fluctuations can occur. Adaptable configuration options that can measure multiple background gases and flexible portability is also needed, as is comprehensive data logging and graphical records. No matter what your application needs, you’ll want an analyzer that can reduce your ongoing costs and provide operational efficiencies, and we don’t believe you should have to compromise.
The DF-560E delivers oxygen measurement to the very lowest levels, delivering users an exceptional LDL of 45ppt. This industry-leading performance is augmented by a variety of extended operational capabilities. Automated maintenance executes automatic zero and span calibrations on a scheduled basis, or executes scheduled automatic checks and notifies users when calibration is needed. An Automatic Maintenance Log records water additions, sensor data, and calibration activity to ensure ISO record-keeping requirements, while Automated Data Logging builds four-day and thirty-day graphical records of analyzer readings.
The DF-560E offers an attractive cost reduction over product life, thanks to its pre-calibrated, long-life sensor that comes with a 5 year warranty. The DF-560E requires only an annual SPAN calibration thereafter, with no programmable cell replacement requirement. Automated maintenance logging is also provided and the DF-560E is available with a choice of calibration options; automatic zero and span on a scheduled basis and notifications of a need for calibration; and a manual calibration system – compactly integrated on the rear of the panel, permitting enhanced device portability.
If you’re looking to include the DF-560E in your new or existing system, our expert team can help. For advice, project management and high-quality engineering, get in touch today to find out more.
The DF-560E is a flexible, adaptable solution for ultra-trace oxygen measurements in UHP gases.
The DF-560E’s LDL of 45ppt O2 is the lowest level available to the semiconductor industry.
The highly stable Coulometric sensor used by the DF-560E compensates for sample and flow rate fluctuations, providing consistent, high-stability measurements.
Automated maintenance performs zero and span calibrations on a scheduled basis, or executes scheduled automatic checks and notifies users when calibration is needed.
Using our non-depleting, highly stable Coulometric O2 sensor, the DF-560E monitors the lowest levels of O2 in multiple background gases.
309mm (12.1”) Wide x 203 (7.9”) High x 253mm (9.9”) Deep
“For in-depth specifications you’ll want to download our technical datasheet which includes information on technology, performance, operating environment, sample conditions and compliance along with technical drawings and top-level benefits and applications.”
“We’ve compiled a complete resource pack full of information about the DF-560E, all in one easy download. Get it now to learn about the benefits and technical specifications of the industry-leading ultra-trace oxygen analyzer.”
Want more information about the features and advantages of the DF-560E? Download the operator manual and product brochure now.
DF-500 Series expert paper
SERVOPRO DF-560E Operator Manual
SERVOPRO DF-560E Product brochure
DF-500 Series Recommended Spares
Our videos give you the chance to watch our products in action and hear from our experts. You can also see our analyzers unboxed, and find out more about our solutions for key applications
Total UHP Solutions
See our unique single-supplier solution for UHP gases
A comprehensive systems solution