DF-560E analyzer for industry-leading ultra-trace oxygen detection


The DF-560E delivers industry-leading ultra-trace oxygen detection

With a Lower Detection Limit (LDL) of 45 parts-per-trillion (ppt), the DF-560E provides the semiconductor industry with industry-best oxygen (O2) measurements for quality control in ultra-high-purity (UHP) electronic grade gas.

  • High stability coulometric trace and percent measurements
  • A no-compromise solution
  • Simple maintenance and reduced ongoing costs

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It’s easy to find the product you need for your application with Servomex


Get in touch to tell us what you need and the application you plan to use it for


Our expert team will help you select the right product package, ensuring you have the accessories and support to get the best performance from your analyzer


Your analyzer will be assembled in one of our state-of-the-art engineering centers and rapidly dispatched to your site

Ultra-trace oxygen measurements at the lowest levels

Joseph Ha
Product Manager, Purity & Specialty

Designed to measure ultra-trace O2 to the very lowest levels, the DF-560E delivers the semiconductor industry an industry-leading 45ppt LDL. Flexible and adaptable, it is able to monitor O2 in multiple background gases while logging data in a variety of formats.

The DF-560E negates the effects of upset-prone applications, thanks to Servomex’s high-stability Coulometric sensing technology, which delivers a fast speed of response in the presence of sample and flow rate changes.


Designed for ease of use

Ideal for semiconductor fabs and analytical carts, the DF-560E is optimized for ease of use and portability. Operation is made via the front panel or digital communications, while hand-carry options make it easy to transport.

The DF-560E also reduces operational costs through its non-depleting, factory-calibrated Coulometric technology, providing cost-effective setup and configuration. The only ongoing maintenance requirement is an annual span calibration, with no programmable cell replacement needed.

High stability coulometric trace and percent measurements

When you require the measurement of ultra-trace oxygen as a contaminant, either for quality control or leak detection purposes, you need a gas analyzer that delivers performance, stability and reliability. The lowest LDL is essential, as is the ability to carry out consistent, high stability measurements in upset prone applications, where sample and flow rate fluctuations can occur. Adaptable configuration options that can measure multiple background gases and flexible portability is also needed, as is comprehensive data logging and graphical records. No matter what your application needs, you’ll want an analyzer that can reduce your ongoing costs and provide operational efficiencies, and we don’t believe you should have to compromise.

A no-compromise solution

The DF-560E delivers oxygen measurement to the very lowest levels, delivering users an exceptional LDL of 45ppt. This industry-leading performance is augmented by a variety of extended operational capabilities. Automated maintenance executes automatic zero and span calibrations on a scheduled basis, or executes scheduled automatic checks and notifies users when calibration is needed. An Automatic Maintenance Log records water additions, sensor data, and calibration activity to ensure ISO record-keeping requirements, while Automated Data Logging builds four-day and thirty-day graphical records of analyzer readings.

Member of Service team walking to analyzer

Simple maintenance and reduced ongoing costs

The DF-560E offers an attractive cost reduction over product life, thanks to its pre-calibrated, long-life sensor that comes with a 5 year warranty. The DF-560E requires only an annual SPAN calibration thereafter, with no programmable cell replacement requirement. Automated maintenance logging is also provided and the DF-560E is available with a choice of calibration options; automatic zero and span on a scheduled basis and notifications of a need for calibration; and a manual calibration system – compactly integrated on the rear of the panel, permitting enhanced device portability.

Man with Servomex System components

Integrate our expertise into your system

If you’re looking to include the DF-560E in your new or existing system, our expert team can help. For advice, project management and high-quality engineering, get in touch today to find out more.

Industry-leading benefits

The DF-560E is a flexible, adaptable solution for ultra-trace oxygen measurements in UHP gases.

Unrivaled performance

The DF-560E’s LDL of 45ppt O2 is the lowest level available to the semiconductor industry.

Ideal for upset-prone applications

The highly stable Coulometric sensor used by the DF-560E compensates for sample and flow rate fluctuations, providing consistent, high-stability measurements.

Extended operational capabilities

Automated maintenance performs zero and span calibrations on a scheduled basis, or executes scheduled automatic checks and notifies users when calibration is needed.

Unrivalled performance

  • Industry-leading 45ppt Lower Detection Limit (LDL)
  • Uses industry-leading Coulometric E-sensor technology
  • Fast speed of response to quickly alert operators of out of specification gas conditions
  • Broad detection range: 0-1ppb – 0-20ppm
  • Manufactured by Servomex – over 70 years’ experience with thousands of units used in the field


  • Suitable for use H2 , He, CH4 , CO, N2 , Ar and a host of fluorocarbons and slightly acidic HP gases
  • Sensor compensates for sample and flow rate fluctuations – ideal for upset prone applications
  • Battery backup optional
  • Use in 18 different sample gases. Standard with our gas scale factor feature‡

Easy to use

  • On-board calibration system option gives both flexibility and portability
  • Optional calibration system for compact integration onto the rear of the panel, optimizing device portability
  • Operable via front panel or digital communication options
  • Comprehensive automated datalogging with 4 day and 30 day graphical reading records

Low cost of ownership

  • Factory calibrated sensors for simplified commissioning
  • Non-depleting Coulometric sensor with five-year warranty
  • Requires only an annual SPAN calibration and quarterly addition of RSA
  • Expensive purifier replacements not required
  • Manufactured by Servomex – over 60 years experience with thousands of units used in the field

Benchmark compliance

  • IEC 61010-1
  • Overvoltage Category II, Pollution Degree 2
  • EU EMC Directive
  • EU Low Voltage Directive

Gases sensed, measurements and technologies

Using our non-depleting, highly stable Coulometric O2 sensor, the DF-560E monitors the lowest levels of O2 in multiple background gases.

Gas Measurement
Oxygen (O₂)ppt, ppm, ppb




  • IEC 61010-1
  • Overvoltage Category II, Pollution Degree 2
  • EU EMC Directive
  • EU Low Voltage Directive

Schematics (select to expand)


309mm (12.1”) Wide x 203 (7.9”) High x 253mm (9.9”) Deep


8.2kg (18lbs)

Get the detailed specifications

“For in-depth specifications you’ll want to download our technical datasheet which includes information on technology, performance, operating environment, sample conditions and compliance along with technical drawings and top-level benefits and applications.”

Joseph Ha
Product Manager, Purity & Specialty

Download all the DF-560E information you need

“We’ve compiled a complete resource pack full of information about the DF-560E, all in one easy download. Get it now to learn about the benefits and technical specifications of the industry-leading ultra-trace oxygen analyzer.”

Joseph Ha
Product Manager, Purity & Specialty

Manuals and brochures

Want more information about the features and advantages of the DF-560E? Download the operator manual and product brochure now.

DF-500 Series expert paper

DF-500 Series expert paper

SERVOPRO DF-560E Operator Manual

SERVOPRO DF-560E Operator Manual

SERVOPRO DF-560E Product brochure

SERVOPRO DF-560E Product brochure

DF-500 Series Recommended Spares

DF-500 Series Recommended Spares

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