With a Lower Detection Limit (LDL) of 45 parts-per-trillion (ppt), the DF-560E provides the semiconductor industry with industry-best oxygen (O2) measurements for quality control in ultra-high-purity (UHP) electronic grade gas.
Designed to measure ultra-trace O2 to the very lowest levels, the DF-560E delivers the semiconductor industry an industry-leading 45ppt LDL. Flexible and adaptable, it is able to monitor O2 in multiple background gases while logging data in a variety of formats.
The DF-560E negates the effects of upset-prone applications, thanks to Servomex’s high-stability Coulometric sensing technology, which delivers a fast speed of response in the presence of sample and flow rate changes.
Ideal for semiconductor fabs and analytical carts, the DF-560E is optimized for ease of use and portability. Operation is made via the front panel or digital communications, while hand-carry options make it easy to transport.
The DF-560E also reduces operational costs through its non-depleting, factory-calibrated Coulometric technology, providing cost-effective setup and configuration. The only ongoing maintenance requirement is an annual span calibration, with no programmable cell replacement needed.
When you require the measurement of ultra-trace oxygen as a contaminant, either for quality control or leak detection purposes, you need a gas analyzer that delivers performance, stability and reliability. The lowest LDL is essential, as is the ability to carry out consistent, high stability measurements in upset prone applications, where sample and flow rate fluctuations can occur. Adaptable configuration options that can measure multiple background gases and flexible portability is also needed, as is comprehensive datalogging and graphical records. No matter what your application needs, you’ll want an analyzer that can reduce your ongoing costs and provide operational efficiencies, and we don’t believe you should have to compromise.
The DF-560E delivers oxygen measurement to the very lowest levels, delivering users an exceptional LDL of 45ppt. This industry-leading performance is augmented by a variety of extended operational capabilities. Automated maintenance executes automatic zero and span calibrations on a scheduled basis, or executes scheduled automatic checks and notifies users when calibration is needed. An Automatic Maintenance Log records water additions, sensor data, and calibration activity to ensure ISO record-keeping requirements, while Automated Data Logging builds four-day and thirty-day graphical records of analyzer readings.
The DF-560E offers an attractive cost reduction over product life, thanks to its pre-calibrated, long-life sensor that comes with a 5 year warranty. The DF-560E requires only an annual SPAN calibration thereafter, with no programmable cell replacement requirement. Automated maintenance logging is also provided and the DF-560E is available with a choice of calibration options; automatic zero and span on a scheduled basis and notifications of a need for calibration; and a manual calibration system – compactly integrated on the rear of the panel, permitting enhanced device portability.
If you’re looking to include the DF-560E in your new or existing system, our expert team can help. For advice, project management and high-quality engineering, get in touch today to find out more.
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The DF-560E is a flexible, adaptable solution for ultra-trace oxygen measurements in UHP gases.
The DF-560E’s LDL of 45ppt O2 is the lowest level available to the semiconductor industry.
The highly stable Coulometric sensor used by the DF-560E compensates for sample and flow rate fluctuations, providing consistent, high-stability measurements.
Automated maintenance performs zero and span calibrations on a scheduled basis, or executes scheduled automatic checks and notifies users when calibration is needed.
Using our non-depleting, highly stable Coulometric O2 sensor, the DF-560E monitors the lowest levels of O2 in multiple background gases.
|Oxygen (O₂)||ppt, ppm, ppb|
309mm (12.1”) Wide x 203 (7.9”) High x 253mm (9.9”) Deep
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Designed specifically for semiconductor fabs and analytical carts, the DF-560E delivers ultra-trace O2 measurements in UHP electronic-grade gas.
Quality control checks for electronics grade gases | Leak detection for electronics grade gases