SERVOPRO product range

Reliable, stable and accurate gas measurements for safe area applications

The SERVOPRO analyzers utilize an extensive portfolio of our non-depleting gas sensing technologies – including Paramagnetic, Zirconia, Flame Ionization Detection, Plasma, and Gas Chromatograph for a diverse range of applications.

These flexible analyzers either meet specific measurement requirements, such as for syngas, hydrocarbons, or trace gas mixtures, or provide multi-gas monitoring capabilities for applications such as continuous emissions monitoring systems or air separation unit plants.

SERVOPRO delivers accurate safe area analysis

Setting the standard for analysis in the industrial gas (IG) and semiconductor markets, the SERVOPRO range leads the field in measurement sensitivity

A wide range of sensing technologies

The flexible SERVOPRO range is designed to suit an extensive variety of measurements in IG and semiconductor applications. To this end, it uses an array of sensing technologies, including non-contact, non-depleting methods, covering a generous selection of gases and measurement ranges, to meet the needs of multiple safe area applications.

Industry-leading detection levels

Whether you’re monitoring impurities in air separation unit gases, or ensuring the highest level of purity in semiconductor gases, the SERVOPRO range is up to the task, delivering the measurement sensitivity and performance required – from percentage-level readings to the lowest levels of trace detection available to the market.

Easy to use and integrate

Designed for simple operation, the SERVOPRO range is available for benchtop use or can be mounted in a 19” rack. All the analyzers feature extensive functionality, can be operated directly via intuitive onboard software, or remotely using a variety of analog and digital communications options, ensuring effective operation now and in the future.

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4900 Multigas

SERVOPRO Safe Area

4900 Multigas是一款高性能CEMS分析仪,设计用于多种多气体测量。

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AquaXact 1688

SERVOPRO Safe Area

坚固耐用的超薄氧化铝氧化铝湿度传感器,可在各种气相工艺应用中测量水分。

SERVOPRO AquaXact 1688
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AquaXact Controller

SERVOPRO Safe Area

专为与AquaXact 1688超薄膜氧化铝氧化铝湿度变送器协调工作而制造。

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Chroma

SERVOPRO Safe Area

色度已针对特定背景气体进行了优化,以确保为您的应用提供最佳性能。

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DF-550E

SERVOPRO Safe Area

DF-550E是一种超痕量库仑氧气分析仪,针对超高纯电子气体的质量测量进行了优化

DF-550E an ultra-trace Coulometric oxygen analyzer.
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DF-560E ULTRA

SERVOPRO Safe Area

DF-560E ULTRA为半导体行业提供业界出色的氧气(O2)测量,用于超高纯(UHP)电子级气体的质量控制。

SERVOPRO DF-560E ULTRA
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DF-745

SERVOPRO Safe Area

DF-745提供了水分的痕量和超痕量测量,可用于LED / LCD制造过程中的超高纯度(UHP)电子气体检查。

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DF-745 SGMax

SERVOPRO Safe Area

DF-745 SGMax设计用于测量特殊气体混合应用中的多种气体混合物。

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DF-749

SERVOPRO Safe Area

DF-749 提供各种背景气体中的痕量和超痕量水分污染物测量,是 LCD 和 LED 制造中使用的 UHP 气体质量检查的理想选择。

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DF-750

SERVOPRO Safe Area

DF-750是一种痕量/超痕量水分分析仪,针对用于300mm半导体工厂的超高纯度(UHP)气体的测量进行了优化。

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DF-750 ULTRA

SERVOPRO Safe Area

DF-750 ULTRA提供行业先进的痕量/超痕量水分测量,针对300mm半导体工厂中使用的超高纯(UHP)气体的质量监控进行了优化。

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DF-760E

SERVOPRO Safe Area

紧凑型DF-760E分析仪专为超高压散装气体的质量控制应用而设计,是用于微量和微量微量水分双重测量的独特解决方案

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DF-760E ULTRA

SERVOPRO Safe Area

紧凑型DF-760E ULTRA专为UHP大宗气体中行业领先的质量控制测量而设计,是针对痕量和超痕量水分和氧气的独特双重分析解决方案。

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FID

SERVOPRO Safe Area

FID具有痕量分析功能,是ASU安全和质量控制应用的理想选择。

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HFID

SERVOPRO Safe Area

使用设置为190°C(374°F)的内部加热炉将样品气体保持在其露点以上,以实现总烃分析(THC)的优异性能。

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MonoExact DF150E

SERVOPRO Safe Area

MonoExact DF150E将Servomex久经考验的库仑式氧气传感器的可靠性与更人性化的包装相结合。

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MonoExact DF310E

SERVOPRO Safe Area

专为精确测量工业气体(IG)应用中的氧气而设计。

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MultiExact 4100

SERVOPRO Safe Area

一种高性能的多气体分析仪,旨在提供多达四个同时的气流测量。

SERVOPRO MultiExact 4100
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MultiExact 4200

SERVOPRO Safe Area

MultiExact 4200可同时分析多达四种气体合成气和HyCO

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NanoChrome

SERVOPRO Safe Area

结合气体传感和信号处理方法的最新进展,NanoChrome彻底改变了超痕量纯度的测量方法。

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NanoChrome ULTRA

SERVOPRO Safe Area

通过使用成熟的超痕量传感技术,NanoChrome ULTRA征服了半导体行业最严格的要求,与竞争技术相比,提供了一种经济高效的解决方案。

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NOx

SERVOPRO Safe Area

测量工业气体和车辆排放应用中的NO或NO / NO2 / NOx浓度。

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Plasma

SERVOPRO Safe Area

等离子可提供准确,高度稳定和可靠的测量,并且灵敏度在0-1ppm范围内。

SERVOPRO Plasma
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PureGas

SERVOPRO Safe Area

基于吸气剂的净化装置,用于净化气相色谱(GC)和其他分析应用中使用的载气

SERVOPRO PureGas
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