DF 750_3
SERVOPRO DF高纯

DF-749水分分析仪检测超高纯(UHP)气体的纯度

DF-749采用Servomex可调谐二极管激光吸收光谱(TDLAS)传感器,可为超高纯(UHP)电子级气体在多种背景气体中提供痕量/超痕量水分测量。

准备购买?以下是基本流程

轻松找到适合自身应用的仕富梅产品

询价

联系我们,告诉我们您需要什么,以及您的应用需求

咨询

们的专家团队将帮助您选择正确的产品包,确保您拥有配件和支持,以使您的分析仪获得优异性能。

交付

您的分析仪将在我们全球先进的工程中心组装,并迅速发送到您的现场

适用于超高纯(UHP)气体的质量检测

Joseph Ha
Joseph Ha
纯度与专业产品经理

DF-749在各种背景气体中提供痕量和超痕量水分污染物测量,包括氮、氢、氦、氩和氧。

理想的超高纯(UHP)气体的质量检查,在LCD和LED制造工艺中至关重要,DF-749紧凑轻便的设计使其易于携带,便于推车或移动应用。强大的硬件/软件设计几乎消除了通常与超高纯(UHP)气体检查相关的干燥时间。

DF-749采用行业先进的TDL传感技术,可实现超灵敏的低检测限(LDL) 250ppt,提供超可靠的基线测量和快速的响应速度。

Robotic Screen Protector Film Or Glass Cover In Manufacture Phone

超稳定的TDL测量

现代LCD和LED制造工艺需要对高纯度电子级气体中的水分污染物进行超痕量质量测量。在这种苛刻的应用中,用户需要一款能够在多种背景气体中提供高精度和超低检测限的水分分析仪。无论您有什么样的应用需求,您都需要一款高性能的水分分析仪。我们认为你们不应该妥协。

DF 749_3

种无可挑剔的解决方案

DF-749 NanoTrace可满足您的应用需求,不仅具有稳定的微量级和超微量级测量性能,还具有灵活的便携性。其采用先进的TDL传感技术,具有零漂移,快速响应,高稳定性和精度,以及抗干扰能力强等特点, DF-749 NanoTrace还具有低至250ppt的低检测限(LDL),并且单台设备即可监测多种背景气体中的水分,可提供精度高且适用性强的监测解决方案。另外,紧凑轻便的设计使其能轻松在端口之间来回移动应用,非常适合固定应用或基于推车的移动应用。

Service team checklist

维护简单且后续成本低

成熟的传感技术和高端功能可降低生命周期内的总持有成本;工厂标定能加快并简化安装;数据存档则让存储和调用标定、系统错误和测量数据的变得简单。

TDL传感器的高稳定性和零漂移特点可延长标定间隔并更大限度减少日常维护需求,从而能在产品较长的生命周期内实现大幅节省。

Servomex System components

您在寻找一款综合性的系统解决方案吗?

如果你要建一个气体分析系统,我们可以帮忙。我们的专家团队与您合作,设计、构建和交付您需要的项目,以满足您的过程要求。联系了解更多信息。

TDL水分测量的优势

稳健和超可靠的DF-749可提供灵活的配置选项和0-20ppm的广泛探测范围。

Certificates

高可靠性

通过将1%的激光输出定向到含有水蒸气的参考电池中,我们消除了激光输出偏离水分峰的可能性。通过连续扫描整个水分峰曲线,我们消除了源/探测器的变化和用比例测量法测量的任何镜面反射损失。

High performance

优异的性能

通过多次传递的“Herriott Cell”,我们有效地将吸收路径延长50M以增加信号,并提供250ppt的低检测限(LDL)。

易于使用

紧凑轻便的设计,DF-749可轻松的在端口之间来回移动,是机架和推车移动应用的理想选择。经过试验和测试的指导用户界面(GUI)使操作人员在一代到另一代的培训门槛较低。

非凡的性能

  • 分析性能不受气室污染影响:即使信号损失高达90%,DF-749也能合规运行。
  • 低检测限(LDL):低至250ppt
  • 仕富梅(Servomex)制造-超过60年的创新和开创性气体分析经验,每年现场应用的设备数以千计。

灵活性

  • 4-20 mA, 0-10 VDC 或 RS 232/485
  • 广泛的监测范围:0-20ppm
  • 可选的隔离气路面板

易于使用

  • 存储和召回功能:能记录标定,系统错误和测量数据,方便存档操作历史。
  • 尺寸紧凑,重量轻,可轻松在端口之间来回移动,非常适合移动应用。

低持有成本

  • 坚固耐用的传感器结构可减少维护需求
  • 零漂移,能延长标定间隔

符合标准

  • IEC 61010-1标准
  • 过压类别II,污染级别2
  • CE 认证

气体传感、测量和技术

加油站 测量
水蒸气(水分) (H₂O)ppb, ppt

Technologies

Servopro DF749

认证

  • IEC 61010-1标准
  • 过压类别II,污染级别2
  • 欧盟EMC指令
  • 欧盟低压指令

原理图(选择展开)

尺寸

483mm (19”) Wide x 266mm (10.5”) High x 608mm (23.9”) Deep

重量

31.8kg (70lbs)

获取详细规格

如果您想了解更详细的规格,您需要下载我们的技术数据表,其中包括技术、性能、操作环境、样品条件和合规信息,以及技术图纸和顶级福利和应用。”

Joseph Ha
Joseph Ha
纯度与专业产品经理

下载DF-749资源包

我们全面的资源包有您需要的关于DF-749的特性和优点的所有信息。现在下载它,以确保您掌握所有重要的信息。

 

Joseph Ha
Joseph Ha
纯度与专业产品经理

手册和宣传册

阅读所有关于DF-749水分分析仪的性能和技术规格-马上下载产品手册和操作手册。

DF-749 NanoTrace操作手册

LCD/LED制造用水分分析仪操作指南

DF-749 NanoTrace操作手册

LCD/LED制造用水分分析仪操作指南

点击删除

SERVOPRO DF-700 Gen 6 推荐备件

适用于DF-700系列分析仪的备件清单

SERVOPRO DF-700 Gen 6 推荐备件

适用于DF-700系列分析仪的备件清单

点击删除

相关视频

Ammonia Application Video
Get reliable ammonia measurements for your industrial process with Servomex. Our ammonia analyzer range provides expert ...

Direct reduction iron (DRI) production
Expert gas analysis solutions for your DRI process and emission monitoring. Accurate gas measurements play an integral role in ...

Systems - A total Solution
We create scalable gas analyzer solutions that help you innovate. Our state-of-the-art engineering centres work with you to build a ...

典型应用

DF-749可测量各种背景气体中超痕量水分,是LCD和LED制造工艺中超高纯(UHP)气体监测的理想选择。

LED和LCD工厂应用中超高纯电子级气体的大宗气体质检LED和| LED和LCD工厂应用中超高纯电子级气体的泄漏检测

超高压气体/半导体

全面的系统解决方案

在我们正在进行的播客系列的最新一集中,了解您需要了解的关于我们著名的 SERVOPRO 水分气体分析仪系列 Gen-7 的所有信息。

Transcript

Gen-7 Podcast transcript

DB: My name is Douglas Barth. I’m the USTC product manager for the DF-700, and I’m here today with…

PR: I’m Phil Rogers, and I am the senior applications engineer here at the USTC for Servomex.

DB: We are going to introduce you to the Generation Seven NanoTrace DF-700 analyzer. It’s a modern analyzer. It’s been recently re-engineered, redesigned…

PR: Re-engineered, updated.

DB: …For the modern LCD and LED manufacturing processes that require ultra-trace quality measurement for moisture, contaminants, and ultra-high-purity electronic grade gases. In such a demanding application, users need analysis capable of delivering high accuracy and low, ultra-low detection limits in multiple background gases. No matter how demanding the application requirement, you will want a device that reduces preventative maintenance costs, maximizes uptime and has a long life in the marketplace.

We don’t believe you should have to compromise, and that’s one of the reasons why we are so bullish on the DF-700 product. So, given that the previous generation is going to end its production run, Phil, can you tell some of the listeners why this new project has been undertaken?

PR: Oh, sure. The DF-700 has been around in its current iteration for about 20 years. That’s quite a long run with the same basic architecture. The circuit board designs are all old, very complicated wiring. It’s essentially an analog analyzer because, you know, the signal gets digitized at the end and… running out of suppliers for a lot of these old components, so we had to update the electronics and the processing power of the analyzer to something that’s current, that will be serviceable for years to come, and get us ready for the next 20 years.

DB: So this is a completely digital analyzer?

PR: Yes, it is, in fact, completely digital.

DB: Wow. Excellent. Yeah, I heard a lot about digitization in the industrial gas side of the business. Great to see that digitization is coming to the semiconductor side of those Servomex products. This new Generation Seven DF-700, how’s it better positioned for our customers in the future?

PR: I wouldn’t say so much that is better positioned, but certainly positioned well in a modern platform. The signal processing means that what we have at our disposal now with the digital instrument is much greater. This allows us to get a quieter signal out of the analyzer which will result in improved detection limits, response time, and elimination of events that are not moisture or oxygen-related. And so that in itself should make a huge difference to our end-users, especially those in the CQC world, the semiconductor manufacturers that are keeping these things running 24-7, 365.

DB: So you’re telling me that all-new electronics, new PCB, hard drive, operating system… so everything is contemporary within the analyzer for this new digital platform? Have you updated the laser cell?

PR: The laser cell itself is essentially unchanged. Herriott cell design doesn’t, you know… you can’t really improve on that. It’s a simple design that’s robust and durable. And so, we are using the exact same cell, exact same lasers, the exact same mirrors. But what we’re doing is we’re getting the signal out of there in a different fashion.

DB: That’s awesome. So I can understand now how this digital platform with all these new pieces are coming together to improve the operation of the instrument. What will the actual customers see on their side of the analyzer from all these new additions that are made in this redesign?

PR: You know, from the outside, the analyzer looks essentially the same. The screen is much bigger, and much brighter, so it’s easier to read and more information can be displayed on the screen in a clear and understandable way. You can see what the analyzer is telling you from across the room, as opposed to having to put your readers on and get in front of the analyzer.

If the unit requires service, the experience will be much better. The sensors, and all components, can be swapped in situ really by a competent field service engineer or technically savvy end-user. Everything is right there, easy to get to, calibration will be following the moisture cell instead of being on the hard drive, the calibrations are on the moisture cell, or if you get a 760, the calibrations are on the oxygen cell, so all of these things make a much smoother service experience. If or when the inevitable service call comes in, it should be easy to do and make the customer happy.

DB: I know that some of the complaints for the previous generation have been about field serviceability. With all these new components, have you designed in some features that will allow the instrument to be serviced in the field?

PR: You know, everything is accessible, from the power supplies that provide power for the CPU and the moisture sensor, to the boards that contain the relays, analog outputs and serial communications. The solid-state hard drive is right there, easy to access, as is the CPU. Again, getting down to the sensors themselves, if something happens and the unit requires service, a new sensor or sensor swap, for troubleshooting purposes even, which does happen, it’s just a matter of pulling it and putting the sensor into the analyzer. The analyzer will pull the circuit board for that sensor, get all the calibration off of it and you’re up and running. Right? Just like that.

DB: So it’s the hard drive, the CPU, the PCBs, the display, the gas panel, all of those items now can be serviced in the field?

PR: Yes.

DB: Wow. That’s a big step forward. That’s the meat of the components within the analyzer that service engineers usually touch. That’s fantastic. You mentioned that the Herriott cell has been around for quite a long time. How long has it been around and could you tell us a little bit about the Herriott cell?

PR: Yeah, the Herriott cell is old technology that was invented in 1965 by the aptly named Donald Herriott. And it consists of two spherical mirrors, with an aperture in one of them, that allows the light from the laser to enter and exit the Herriott cell. It gives you a very long path length, up to 93 passes, which is about a 50-meter path length. So that’s essentially what a Herriott cell is, spherical mirrors with the light from the laser bouncing back and forth between them.

DB: So I know that the Herriott cell is where the actual sample or measurement is taken. Specifically, Servomex uses Tunable Diode Laser Absorption Spectroscopy inside that Herriott cell. Tell the listeners a little bit about the benefits and features of Tunable Diode Laser.

PR: The Tunable Diode Laser is a neat technology, but we’re looking at it as an absorption spectrometer. So we have to know the wavelength at which moisture absorbs light. And in this case we use 1854 nanometers where you get the laser output tuned to that output frequency by adjusting the temperature on the laser. Each laser has its own unique characteristics and so the laser temperature is unique for each laser.

And once we get the moisture peak tuned in, we modulate the current to that laser, which essentially causes that output to scan across the moisture peak. The moisture peaks at 1854. So we go from, say 1853 and a half to 1854 and a half, and one nanometer, by modulating the current to that laser and slightly affecting the output frequency of that laser.

So, you’re scanning across the moisture peak literally thousands of times a second, and you’re getting a lot of information out of there. It is a direct reading spectrometer. It will compare with the CRDS technology, which is also widely used in the semiconductor industry. CRDS is Cavity Ring-Down Spectroscopy, and what that does, is that emits a pulse of light within the sample cell. It goes between two highly reflective mirror surfaces and they measure the decay time, essentially, for that light to completely decay beyond detectable limits. And that sounds all well and good, but, you know, you’re measuring time, you’re not measuring moisture. And if those mirrors become fogged, or lose any of the reflectivity, it’s going to greatly impact the sensitivity of the device, and the detection limit of the device.

DB: That’s quite a difference. I mean, the only thing that’s basically the same between those two is the laser. They’re very different after that light enters into the chamber.

PR: They use a different frequency than we do as well. They use 1392 nanometers as opposed to ours, which is 1854. But that’s a minor difference there, really.

DB: You mentioned that we used the 1854 wavelength for our measurement. I picked up on something you said about being able to know the centroid of that 1854 wavelength. Could you tell the listeners a little bit more about that?

PR: Okay. Well, what we do is we have what we call a reference peak that the analyzer utilizes to keep the laser tuned properly. Our sensor is divided into two sections. We’ve got the Herriott cell, which is where the sample gas is, and the lasers, and then we have the laser chamber itself, which is isolated from the Herriott cell, and is hermetically sealed and pressurized deep out to keep out contamination.

And we separate the laser chamber from the Herriott cell with a little sapphire window. There’s a small amount of light that reflects off of that window, probably close to, you know, 1% or even less of the light from the laser, is reflected off that window back through. We have a little cuvette out there that contains moisture, so that reflective laser passes through that cuvette to a separate detector. Now there’s always moisture in there, and so the reference detector always shows a moisture peak. The software of the analyzer is designed to recognize that peak and if it sees that peak moving a little bit one way or the other, up or down in wavelength, it will adjust the current being supplied to that laser just a little bit to ensure that the peak stays in the right location and thus the laser is tuned to the proper output frequency.

DB: So if I understand this right, Phil, you’re saying that we use a secondary detector and a cuvette of moisture, and bleed off a little bit of the laser, constantly tell the analyzer where the moisture peak is, and make sure that it doesn’t deviate from that wavelength.

PR: That’s correct.

DB: Another piece that I heard you say during your explanation of Tunable Diode Laser Absorption Spectroscopy was this moisture peak sweep operation. How does that benefit our customers, that the analyzer and our laser technology sweeps across the entire peak?

PR: The sweeping across the peak, there’s a lot going on there. As you sweep across the peak, you’re measuring the brightness of the laser both on-peak and off-peak as you scan across that wavelength. The nature of this measurement is ratiometric. So unlike the cavity ring down, which you discussed earlier, if we lose a little bit of reflectivity due to optical fogging or who knows what real-life sort of things might happen to an instrument in an industrial application, you lose a little bit of reflectivity.

It’s not a big deal at all to analyze to compensate for that automatically, because the light will decrease, the intensity of light will decrease, both on-peak and off-peak, by the same percentage. So the ratio at any given moisture concentration between the on-peak measurement and the off-peak measurement is going to be the same at any given moisture concentration.

So if you lose 10% of your reflectivity – that’s both on-peak and off-peak – and if the ratio between the on-peak and off-peak measurement is going to stay the same, the measurement accuracy is going to stay the same. We had some years ago, we had an analyzer that lost more than 90% of its reflectivity due to contamination. We fired that up in our lab and tested against our known standards and it was still reading accurately with a greater than 90% reflectivity. I have to say I was surprised when that happened, but it gave me faith in the product.

DB: Wow, a 90% loss in an actual intensity of the laser and still measuring accurately, that’s amazing.

PR: It was astonishing to me, quite honestly. There it was. It worked.

DB: So sweeping across the peak, if you lose reflectivity or intensity, you could lose intensity from either the detector and its ability to pick it up, or the laser source. Would not this also calibrate out differences in the laser source and detector?

PR: Anything that has to do with the intensity of the light, be it the output of the laser degrading over the years, the output characteristics of the detector degrading over the years, or the reflectivity of the mirrors being affected by process conditions, all of this, from an algorithmic standpoint, it doesn’t matter to the algorithm.

DB: Say there was an interfering gas in with the background gas and you went off-peak, and it did absorb the laser, that interfering gas would be attenuated and you could calibrate that out?

PR: Yes, it would just be offset out anyways. You’re looking at the center peak, you’re not looking at anything off to the side. And moisture is rather specific at 1854, so in general, interfering elements are pretty much just offset out of there.

DB: So interfering elements, a difference in the intensity of the laser source, a difference in the ability to detect that source, and any kind of contamination on the mirror is instantaneously tenuously zeroed out of the analyzer for you and corrected for?

PR: Yeah.

DB: That’s amazing. No wonder this technology’s been around so long and is used in so many different places like ultra-high purity, semiconductor applications, specialty gas, the electronics market, LED, and display manufacturing.

Thank you so much for taking your time today, Phil, and discussing the amazing capabilities of Tunable Diode Laser and the new Gen-7 DF-700 product. I’d like to thank you for your time.

PR: You’re entirely welcome. This has been a fun thing to do.

DB: And I would like to remind all our listeners to visit servomex.com and find out more about the Gen-7 analyzer online. Thank you.

 


© Copyright 2024 - Servomex is a Spectris company.
点击这里下载您选择的文件