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The revolutionary NanoChrome ULTRA is the preferred choice for ultra-trace purity measurement in the semiconductor industry. It combines new advances in gas sensing and signal processing methods to deliver exceptional performance.
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Contact us and tell us your needs and target applications.
Our team of experts will help you select the right product kit, including related accessories and support, to ensure that the analyzer provided to you delivers superior performance.
Your analyzer will be assembled in our state-of-the-art engineering centers worldwide and shipped to you quickly.
NanoChrome ULTRA is a high-performance analyzer designed specifically for the semiconductor manufacturing industry, providing the highest reliability monitoring of argon (Ar), methane (CH4), carbon monoxide (CO), carbon dioxide (CO2), hydrogen (H2), nitrogen (N2), and non-methane hydrocarbons (NMHC), including Ar, H2, helium (He), N2, and oxygen (O2).
The NanoChrome ULTRA features a larger display and brand-new software, utilizing an advanced plasma emission detector (PED) sensor and sensitive ProPeak software, both developed specifically by Servomex.
NanoChrome ULTRA’s sensing technology offers significant advantages over traditional flame ionization detector (FID) and reducing gas detection (RGD) sensing technologies in terms of performance, stability, safety, and the ability to reduce ongoing costs.
Servomex’s advanced signal recovery uses the patented ProPeak filtering method to provide highly sensitive and selective measurements you can rely on. The NanoChrome ULTRA also offers significant cost advantages by eliminating the need for a methanator or combustible gas.
When monitoring UHP gases used in semiconductor wafer manufacturing, superior sensitivity and performance are paramount. A suitable analytical solution must offer the flexibility to monitor all necessary gases in a common background atmosphere—and provide complete selectivity and accuracy at ultra-trace levels. Whatever your application’s requirements, you need a solution that reduces ongoing costs and helps improve your business efficiency. We believe you don’t have to compromise.
The NanoChrome ULTRA is a game-changing analyzer, offering unparalleled performance accuracy and selectivity. Utilizing advanced, patented PED sensing technology, this device offers significant advantages over similar analytical techniques. It is highly adaptable to measuring gases in a wide variety of gas streams and eliminates the need for flammable gases—making the NanoChrome ULTRA an enhanced safety solution. When a complete standalone solution is required, the NanoChrome ULTRA can be used in conjunction with the DF-500 (ultra-trace ppt O2) and DF-700 (ultra-trace moisture) analyzer series.
By combining Servomex’s proprietary non-consumable PED technology with advanced processing and operating software, the NanoChrome ULTRA extends calibration cycles, significantly reducing ongoing costs over its product lifespan. Additive intelligent signal processing ensures high accuracy, further extending process uptime. Comprehensive digital communication protocols and access via web or internet browsers facilitate flexible remote device interaction, while the intelligent software package provides the ability to generate comprehensive reports and statistical analyses. This makes the NanoChrome ULTRA comparable to all other UHP gas monitoring analyzers.
If you need to build a UHP gas analysis system and require products from a single supplier for seamless integration, then Sensetime can help. Please contact our team of experts for more details.
革命性的NanoChrome ULTRA可作为独立设备或作为Servomex超高压气体整体解决方案的一部分，为半导体行业带来重大利益
NanoChrome ULTRA complies with low voltage, EMC and applicable directives.
Employing highly sensitive plasma radiation detection technology eliminates the need for FID or RGD detectors, thus avoiding issues related to safety and high ownership costs.
Each analyzer comes equipped with unique Pro-Peak software and a reliable Windows 10 operating system for enhanced security and stability. The fully automated system and large display screen greatly simplify the operation of the equipment.
Exceptional performance: The innovative high-sensitivity plasma emission detector (PED) enables ultra-trace measurements of Ar, N2, H2, CH4, CO, CO2, and NMHC. ProPeak peak detection technology achieves significantly higher measurement sensitivity. Direct analysis methods eliminate uncertainties in FID and RGD measurements.
A flexible and comprehensive solution. Ultra-trace levels of H2, CH4, CO, CO2, N2, Ar, and NMHC in a variety of common background gases (including He, H2, N2, Ar, and O2). When used in conjunction with the DF-500 analyzer for trace O2 and the DF-700 analyzer for trace moisture, a complete standalone UHP gas analysis solution provides remote access via digital communication: Internet/Ethernet and RS232.
Easy-to-use , comprehensive reporting and monitoring software with full access to chromatograms, process results, statistics, and historical values. The internal dilution system option eliminates the need for flammable gases, enhancing safety and simplifying installation.
It features low-cost , non-depleting sensors and intelligent software that extend calibration intervals; it requires no methanator or consumable fuel gas; and it offers cost-effective and simplified routine maintenance.
Compliant with reference standards , low voltage, EMC and applicable directives.
NanoChrome ULTRA measures the following gases in common background gases at ultra-trace levels for maximum reliability in purity monitoring.
Technologies
Compliant with EMC directives, rated for Class II overvoltage and Class 2 pollution.
482 mm (18.9 inches) wide x 117 mm (4.6 inches) high x 600 mm (23.6 inches) deep
11-27kg (25-60lb) depending on application
“ To obtain in-depth specifications, you will need to download our technical datasheets, which include information on the technology, performance, operating environment, sample conditions, and compliance, as well as technical drawings and top-level benefits and applications. “
“Our NanoChrome ULTRA resource pack contains all the information you need to discover how the analyzer can enhance process performance, including product manuals and operation manuals.”
NanoChrome ULTRA provides accurate and reliable gas analysis for applications and processes across a wide range of industries.
Semiconductor Manufacturing – Quality Control Measures | Semiconductor Manufacturing – Fixed Analysis System
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