SERVOPRO DF high purity

The DF-730 monitors ultra-trace moisture in HCl

The DF-730 is an ultra-trace moisture analyzer that monitors the electronics-grade, high-purity hydrogen chloride (HCl) gas used in semiconductor fabs.

Trace moisture measurements for electronic grade HCI gas production

Dan Johnson
Dan Johnson
Director of Product Management, P&S

Designed to analyze moisture contamination in electronics grade HCl used in semiconductor fabs, the DF-730 is ideal for quality control and leak detection applications.

Servomex’s industry-leading Tunable Diode Laser (TDL) sensing technology and a robust Herriott Cell enables a broad measurement range of 10 parts-per-billion (ppb) to 10 parts-per-million (ppm).

By ensuring moisture only comes into contact with minimal optical components, the DF-730’s performance is unaffected by loss in mirror reflectivity – ensuring a fast response measurement that is stable, accurate and consistent.

NanoTrace DF730

Optimized to deliver affordability over the life of the analyzer

The DF-730’s leading-edge TDL sensing technology provides zero drift, helping to extend maintenance periods and reduce calibration needs.

With its high performance, ultra-stable monitoring capability and considerable operational cost-savings, the DF-730 is an ideal purity monitoring solution for semiconductor fabs.

High stability coulometric trace and percent measurements

When you require quality control of electronics grade HCI gas, you need a moisture analyzer that delivers consistent, reliable measurements with sensitive performance. A flexible monitoring range is a must, as is a sensing technology that operates effectively for extended periods – even with significant signal loss. No matter what your application needs, you’ll want a moisture analyzer that can reduce your ongoing costs and provide operational efficiencies. At Servomex, we don’t believe you should have to compromise.

A no-compromise solution

The DF-730 is specifically designed to meet your application needs, addressing the high quality and performance criteria demanded by semiconductor manufacturers. This device uses high stability TDL sensing and a robust Herriot Cell, helping to minimize water contact with optical components. This eliminates loss of mirror reflectivity issues and allows the DF-730 to deliver reliable baseline measurements. A broad measurement range of 1ppb-10ppm ensures flexible performance in the majority of process conditions. This advanced performance makes the DF-730 the ideal monitoring solution for your application needs.

Simple maintenance and reduced ongoing costs

Added to its considerable monitoring capability is the DF-730’s ability to reduce ongoing costs. The use of patented leading-edge TDL sensing technology means there is zero drift, reduced calibration needs and minimal ongoing maintenance. Engineered into a resilient, high performance design, the DF-730 offers users an extensive operational life with low cost-of-ownership.

Servomex System components

The systems expertise you need

If you’re building a gas analysis system, our expert team can help. We’ll work with you to ensure the best results, with project management from start to finish. Get in touch to learn more.

Ready to buy? Here’s how it works

It’s easy to find the product you need for your application with Servomex

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Get in touch to tell us what you need and the application you plan to use it for

Servomex Gas System Schematics


Our expert team will help you select the right product package, ensuring you have the accessories and support to get the best performance from your analyzer

woman Assembling Sensors


Your analyzer will be assembled in one of our state-of-the-art engineering centers and rapidly dispatched to your site

The benefits of TDL moisture measurement

The high-performance DF-730 analyzer offers ultra-stable monitoring and significant cost savings.

High reliability

By minimizing water contact with optical components, the DF-730’s repeatable baseline measurements are unaffected by loss in mirror reflectivity, ensuring accuracy and stability.

Exceptional performance

The DF-730’s analysis is immune from gas cell concentration, ensuring the analyzer continues to operate to specification with up to 90% signal loss.

Extended maintenance periods

Ultra-stable TDL sensing means that the DF-730 requires less frequent maintenance, while requirements are simple, with no consumables required.

Unrivalled performance

  • Analysis immune from gas cell concentration: DF-730 operates to specification with up to 90% signal loss
  • 10ppb Lower Detection Limit (LDL)
  • Manufactured by Servomex – over 60 years’ experience with thousands of units used in the field


  • Tunable Laser Diode (TDL) sensing provides high stability and minimal moisture contact with optical elements
  • Broad detection range: 0ppb – 10ppm
  • Operable via front panel or digital communication options

Easy to use

  • Simplified ongoing maintenance requirements with no consumables required
  • High reliability; repeatable baseline measurements unaffected by loss in mirror reflectivity

Low cost of ownership

  • Maintenance periods extended by the use of ultra-stable TDL sensing technology
  • Zero drift reduces calibration requirements

Benchmark compliance

  • IEC 61010-1
  • Overvoltage Category II, Pollution Degree 2
  • EU EMC Directive
  • EU Low Voltage Directive

The DF-730 combines Servomex’s advanced TDL sensing technology with a robust Herriot Cell for trace and ultra-trace-level moisture impurities in HCl.

Gas Measurement
Water Vapour (Moisture) (),


NanoTrace DF730


  • IEC 61010-1
  • Overvoltage Category II, Pollution Degree 2
  • EU EMC Directive
  • EU Low Voltage Directive

Schematics (select to expand)


465mm (12.1″) Wide x 190 (7.9″) High x 253mm (9.9″) Deep


<31.8kg (70lbs)

Get the detailed specifications

“For in-depth specifications you’ll want to download our technical datasheet which includes information on technology, performance, operating environment, sample conditions and compliance along with technical drawings and top-level benefits and applications.”

Dan Johnson
Dan Johnson
Global Head of Product Management – P&S

Download the DF-730 resource pack

“Get all the information about the DF-730 that you need in one easy download. We’ve collected the essential resources to ensure you know all about the features and benefits of this sensitive moisture analyzer.”

Dan Johnson
Dan Johnson
Global Head of Product Management – P&S

Typical applications

Designed for the analysis of moisture as a contaminant in electronics-grade HCl gas used in semiconductor fabs, the DF-730 is ideal for quality control and leak detection applications.

Quality control of HCl gas in semiconductor fabs 

UHP Gases / Semiconductors

A comprehensive systems solution

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