The DF-730 is an ultra-trace moisture analyzer that monitors the electronics-grade, high-purity hydrogen chloride (HCl) gas used in semiconductor fabs.
Designed to analyze moisture contamination in electronics grade HCl used in semiconductor fabs, the DF-730 is ideal for quality control and leak detection applications.
Servomex’s industry-leading Tunable Diode Laser (TDL) sensing technology and a robust Herriott Cell enables a broad measurement range of 10 parts-per-billion (ppb) to 10 parts-per-million (ppm).
By ensuring moisture only comes into contact with minimal optical components, the DF-730’s performance is unaffected by loss in mirror reflectivity – ensuring a fast response measurement that is stable, accurate and consistent.
The DF-730’s leading-edge TDL sensing technology provides zero drift, helping to extend maintenance periods and reduce calibration needs.
With its high performance, ultra-stable monitoring capability and considerable operational cost-savings, the DF-730 is an ideal purity monitoring solution for semiconductor fabs.
When you require quality control of electronics grade HCI gas, you need a moisture analyzer that delivers consistent, reliable measurements with sensitive performance. A flexible monitoring range is a must, as is a sensing technology that operates effectively for extended periods – even with significant signal loss. No matter what your application needs, you’ll want a moisture analyzer that can reduce your ongoing costs and provide operational efficiencies. At Servomex, we don’t believe you should have to compromise.
The DF-730 is specifically designed to meet your application needs, addressing the high quality and performance criteria demanded by semiconductor manufacturers. This device uses high stability TDL sensing and a robust Herriot Cell, helping to minimize water contact with optical components. This eliminates loss of mirror reflectivity issues and allows the DF-730 to deliver reliable baseline measurements. A broad measurement range of 1ppb-10ppm ensures flexible performance in the majority of process conditions. This advanced performance makes the DF-730 the ideal monitoring solution for your application needs.
Added to its considerable monitoring capability is the DF-730’s ability to reduce ongoing costs. The use of patented leading-edge TDL sensing technology means there is zero drift, reduced calibration needs and minimal ongoing maintenance. Engineered into a resilient, high performance design, the DF-730 offers users an extensive operational life with low cost-of-ownership.
If you’re building a gas analysis system, our expert team can help. We’ll work with you to ensure the best results, with project management from start to finish. Get in touch to learn more.
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The high-performance DF-730 analyzer offers ultra-stable monitoring and significant cost savings.
By minimizing water contact with optical components, the DF-730’s repeatable baseline measurements are unaffected by loss in mirror reflectivity, ensuring accuracy and stability.
The DF-730’s analysis is immune from gas cell concentration, ensuring the analyzer continues to operate to specification with up to 90% signal loss.
Ultra-stable TDL sensing means that the DF-730 requires less frequent maintenance, while requirements are simple, with no consumables required.
The DF-730 combines Servomex’s advanced TDL sensing technology with a robust Herriot Cell for trace and ultra-trace-level moisture impurities in HCl.
|Water vapour (Moisture) (H₂O)||ppm, ppb|
465mm (12.1″) Wide x 190 (7.9″) High x 253mm (9.9″) Deep
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Find out more about the performance and technical specifications of the DF-730 – download the operator manual and product brochure now.
Designed for the analysis of moisture as a contaminant in electronics-grade HCl gas used in semiconductor fabs, the DF-730 is ideal for quality control and leak detection applications.
Quality control of HCl gas in semiconductor fabs