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Key features
  • Unique industry solution for ppt monitoring of moisture and O2
  • Operable via front panel or digital communication options
  • Broad Detection Range: 0-20ppm – 0-2ppb min (H20) / 0-20ppm – 0-1ppb min. (O2)
Easy to use
Low cost of ownership
Unrivalled performance
Benchmark compliance

A unique analyzer solution for the simultaneous monitoring of trace moisture and trace oxygen, the DF-760E is a compact integrated solution for monitoring UHP bulk gases used in the manufacture of integrated circuit boards.

Combining the industry-leading properties of Servomex’s non-depleting Coulometric E-Sensor and robust Tunable Diode Laser (TDL) technology within a single compact unit, the DF-760E measures ultra-low levels contaminant levels of H2 and O2 within background gas blends of N2, H2, He, O2 and Ar (H2O in O2 only).

In offering an exceptionally low, industry-leading Lower Detection Limit (LDL) of 100ppt (H2O) / 45ppt (O2), the DF-760E offers the fast speed of response, unsurpassed stability and immunity from trace acid damage which makes it ideal for quality checking and leak detection in semiconductor FAB applications.

This exceptional measurement performance is supported by a low-maintenance design, delivered through the resilient zero-drift sensing technologies which require no ongoing calibration.

  • 483mm (19”) Wide x 266mm
  • (10.5”) High x 608mm (23.9”) Deep 
  • 31.8kg (70lbs)
  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive

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Key Applications
  • Bulk gas quality control checks for integrated circuit board fabs
  • Leak detection checks
Service and Spares

Ensure your DF-760E dual oxygen and moisture analyzer delivers optimum performance with Servomex Service Network.

Through our global network of engineers and service centers, we provide complete lifetime support for your analyzer. Our services range from installation and commissioning to supplying high quality spares and arranging scheduled servicing: visit our Service Network pages to find out more.

Spares lists for the DF-760E are available by clicking on the Downloads tab.

Global Service Network