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Key features
Flexible
  • Trace level Tuneable Diode Laser (TDL) sensing provides high stability and minimal moisture contact with optical elements
  • Broad detection range: 0-20ppm
  • Storage and recall function: calibration, system error and measurement data facilitates archiving operational history
  • Operable via front panel or digital communication options
Easy to use
Low cost of ownership
Unrivalled performance
Benchmark compliance

Designed specifically to make trace and ultra-trace measurements in a range of ultra high purity gases, the DF-750 is the leading choice in moisture analysis for the semiconductor industry. Optimized for use in 300mm semiconductor fabs, the DF-750 measures moisture as a contaminant in electronics grade nitrogen, hydrogen, helium, argon and oxygen.

With Servomex’s industry-leading TDL sensing technology delivering an industry-leading 100ppt Lower Detection Limit (LDL), the DF-750 delivers a stable, highly accurate measurement that meets the precise monitoring needs of semiconductor production.

This analyzer also offers attractive affordability over product life. The DF-750’s robust sensor construction has low lifetime maintenance requirements and delivers zero-drift stability that greatly extends calibration intervals. This low cost- of-ownership combined with exceptional measurement performance means that the DF-750 is the first-choice analytical solution for UHP gas quality checks.

Specification
Size
  • 483mm (19”) Wide x 266mm(10.5”) High x 608mm (23.9”) Deep
Weight
  • <31.8kg (70lbs)
Certifications
  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive

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Key Applications
  • Bulk gas quality control checks for UHP electronic gases used in 300mm semiconductor fabs
  • Leak detection checks for UHP electronic gases used in 300mm semiconductor fabs
Downloads
Service and Spares

Ensure your DF-750 NanoTrace moisture analyzer delivers optimum performance with Servomex Service Network.

Through our global network of engineers and service centers, we provide complete lifetime support for your analyzer. Our services range from installation and commissioning to supplying high quality spares and arranging scheduled servicing: visit our Service Network pages to find out more.

Spares lists for the DF-750 are available by clicking on the Downloads tab.

Global Service Network