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Key features
  • Tunable Diode Laser (TDL) sensing provides high stability and minimal moisture contact with optical elements 
  • Broad detection range: 1ppb – 10ppm 
  • Operable via front panel or digital communication options 
Easy to use
Low cost of ownership
Unrivalled performance
Benchmark compliance

Designed to analyze moisture contamination in electronics grade HCl used in semiconductor fabs, the DF-730’s highly sensitive performance is ideal for quality control and leak detection applications. Servomex’s industry-leading TDL sensing technology and a robust Herriot Cell enables a broad measurement range of 1ppb-10ppm. By ensuring moisture only comes into contact with minimal optical components, the DF-730’s performance is unaffected by loss in mirror reflectivity - ensuring a fast response measurement that is stable, accurate and consistent. 

This device is also optimized to deliver attractive affordability over product life. The use of leading-edge TDL sensing technology provides zero drift, helping to extend maintenance periods and reduce calibration needs; these aspects combine to make the DF-730 an ideal solution for semiconductor fabs, with its high performance, ultra-stable monitoring capability and considerable operational cost-savings. 

  • 465mm (12.1") Wide x 190 (7.9") High x 253mm (9.9") Deep
  • <31.8kg (70lbs)
  • IEC 61010-1
  • Overvoltage Category II, Pollution Degree 2
  • EU EMC Directive
  • EU Low Voltage Directive

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Key Applications
  • Quality control of HCl gas in semiconductor fabs 
Service and Spares

Ensure your DF-730 NanoTrace analyzer delivers optimum performance with Servomex Service Network.

Through our global network of engineers and service centers, we provide complete lifetime support for your analyzer. Our services range from installation and commissioning to supplying high quality spares and arranging scheduled servicing: visit our Service Network pages to find out more.

Spares lists for the DF-730 are available by clicking on the Downloads tab.

Global Service Network