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Key features
  • Broad detection range: 0-1ppb - 0-20ppm
  • Monitors multiple background gases with a single unit
  • Sensor compensates for sample and flow rate fluctuations - ideal for upset prone applications
  • Operable via front panel or digital communication options
Easy to use
Low cost of ownership
Unrivalled performance
Benchmark compliance

Designed to measure ultra-trace oxygen to the very lowest levels, the DF-560E delivers the semiconductor industry an industry-leading 45ppt Lower Detection Limit (LDL). Flexible and adaptable, the DF-560E is able to monitor O2 in multiple background gases while logging data in a variety of formats.

This device negates the effects of upset prone applications, thanks to Servomex’s high stability Coulometric sensing technology delivering a fast speed of response in the presence of sample and flow rate changes.

Ideal for semiconductor fabs and analytical carts, the DF-560E is optimized for ease of use and portability. Operation is made via the front panel or digital communications, while various hand carry options make it easy to transport. The DF-560E also reduces operational costs through non- depleting, factory calibrated Coulometric technology, providing cost-effective setup and configuration. The only ongoing maintenance requirement is an annual SPAN calibration, with no programmable cell replacement needed.

  • 309mm (12.1”) Wide x 203 (7.9”) High x 253mm (9.9”) Deep
  • 8.2kg (18lbs)
  • IEC 61010-1 
  • Overvoltage Category II, Pollution Degree 2 
  • EU EMC Directive 
  • EU Low Voltage Directive 

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Key Applications
  • Quality control checks for electronics grade gases
  • Leak detection for electronics grade gases
Service and Spares

Ensure your DF-560E ultra-trace oxygen analyzer delivers optimum performance with Servomex Service Network.

Through our global network of engineers and service centers, we provide complete lifetime support for your analyzer. Our services range from installation and commissioning to supplying high quality spares and arranging scheduled servicing: visit our Service Network pages to find out more.

Spares lists for the DF-560E are available by clicking on the Downloads tab.

Global Service Network